Patents by Inventor Hiral M. Ajmera

Hiral M. Ajmera has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contact ring spin during idle time and deplate for defect reduction
    Publication number: 20040222101
    Abstract: Embodiments of the invention provide a method for removing contaminants from a plating bath contained in a weir-type plater during idle times. The method broadly includes positioning a lower portion of a substrate support assembly into the plating bath and rotating the substrate support assembly at a rotation rate of between about 1 rpm and about 60 rpm for between about 5 seconds and about 30 seconds to circulate the plating solution such that contaminants accumulating on the surface of the plating solution are urged to flow over a weir of the weir-type plater.
    Type: Application
    Filed: April 14, 2004
    Publication date: November 11, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Hiral M. Ajmera, Roman M. Mostovoy, Glen T. Mori