Patents by Inventor Hiroaki Narusima

Hiroaki Narusima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transport apparatus, substrate holding apparatus and substrate processing apparatus
    Patent number: 6184972
    Abstract: Spoke shaped (petal shaped) through holes or cavities are provided at the center or a substrate holder which attaches and holds a substrate over substantially the entire surface, to allow vertical movement of a center-up member having a plurality of radially extended spoke shaped mounting portions. As a result, degradation in the flatness of a substrate at the time of attaching the substrate to the mounting surface of the substrate holder is minimized.
    Type: Grant
    Filed: September 14, 1999
    Date of Patent: February 6, 2001
    Assignee: Nikon Corporation
    Inventors: Shinji Mizutani, Hiroaki Narusima