Patents by Inventor Hiroaki SOGAME

Hiroaki SOGAME has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cr alloy target material
    Patent number: 11118248
    Abstract: Provided is a Cr alloy target material with which formation of craters on the surface of the Cr alloy target material during film formation can be limited and the adhesion of droplets on the material being treated can be limited. The Cr alloy target material is represented by an atom ratio composition formula of Cr100-x-yM1xM2y, wherein 0.1?x?21.0, 0.1?y?23.0, M1 is at least one kind of element selected from Ti and V, and M2 is at least one kind of element selected from Mo, Mn, B, W, Nb and Ta, with the balance being unavoidable impurities. The Cr alloy target material contains 10-1000 mass ppm of oxygen as an unavoidable impurity.
    Type: Grant
    Filed: December 5, 2017
    Date of Patent: September 14, 2021
    Assignee: HITACHI METALS, LTD.
    Inventors: Koichi Sakamaki, Kazuya Saito, Hiroaki Sogame
  • Cr ALLOY TARGET MATERIAL
    Publication number: 20190352746
    Abstract: Provided is a Cr alloy target material with which formation of craters on the surface of the Cr alloy target material during film formation can be limited and the adhesion of droplets on the material being treated can be limited. The Cr alloy target material is represented by an atom ratio composition formula of Cr100-x-yM1xM2y, wherein 0.1?x?21.0, 0.1?y?23.0, M1 is at least one kind of element selected from Ti and V, and M2 is at least one kind of element selected from Mo, Mn, B, W, Nb and Ta, with the balance being unavoidable impurities. The Cr alloy target material contains 10-1000 mass ppm of oxygen as an unavoidable impurity.
    Type: Application
    Filed: December 5, 2017
    Publication date: November 21, 2019
    Applicant: Hitachi Metals, Ltd.
    Inventors: Koichi SAKAMAKI, Kazuya SAITO, Hiroaki SOGAME