Abstract: Described herein is a technique capable of improving a film uniformity on a surface of a substrate and a film uniformity among a plurality of substrates including the substrate. According to one aspect thereof, there is provided a substrate processing apparatus including: a substrate retainer including: a product wafer support region, an upper dummy wafer support region and a lower dummy wafer support region; a process chamber in which the substrate retainer is accommodated; a first, a second and a third gas supplier; and an exhaust system. Each of the first gas and the third gas supplier includes a vertically extending nozzle with holes, wherein an upper of an uppermost hole and a lower end of a lowermost hole are arranged corresponding to an uppermost and a lowermost dummy wafer, respectively. The second gas supplier includes a nozzle with holes or a slit.

Abstract: A resin molded component includes a bus bar having conductivity, a conductive member including an insertion hole into which the bus bar is inserted along an axis line direction, a resin member covering the bus bar and insulating the bus bar and the conductive member, and a potting material charged into the insertion hole. The bus bar includes a bend terminal portion positioned at an end portion in the axis line direction, and bent along a terminal bend direction, and a bus bar crank portion positioned inside the insertion hole and extending along a crank direction intersecting with the axis line direction and the terminal bend direction. The resin member includes a resin crank portion positioned inside the insertion hole and covering and insulating the bus bar crank portion. The potting material covers a whole circumference of the resin crank portion when charged into the insertion hole.

Abstract: A transparent layered film is produced by forming an anti-water-mark layer on a first side of a transparent resin layer and forming an uneven structure on a surface of the anti-water-mark layer, wherein the anti-water-mark layer comprises a cured product of a curable composition containing a curable resin, a thermoplastic resin, and a metal oxide particle having an average primary particle size of 1 to 100 nm, and the uneven structure has a roughness average Ra of not less than 0.005 and less than 0.03 ?m, a mean spacing of profile irregularities Sm of 50 to 300 ?m, an average absolute slope ?a of less than 0.1°, and a ten-point average roughness Rz of less than 0.2 ?m. Lamination of the film on a glass-containing upper electrode of a touch screen display prevents scattering of glass fragments produced by breakage of the upper electrode, occurrence of water marks, and sparkling on a high-definition display provided with the film.

Abstract: A transparent layered film is produced by forming an anti-water-mark layer on a first side of a transparent resin layer and forming an uneven structure on a surface of the anti-water-mark layer, wherein the anti-water-mark layer comprises a cured product of a curable composition containing a curable resin, a thermoplastic resin, and a metal oxide particle having an average primary particle size of 1 to 100 nm, and the uneven structure has a roughness average Ra of not less than 0.005 and less than 0.03 ?m, a mean spacing of profile irregularities Sm of 50 to 300 ?m, an average absolute slope ?a of less than 0.1°, and a ten-point average roughness Rz of less than 0.2 ?m. Lamination of the film on a glass-containing upper electrode of a touch screen display prevents scattering of glass fragments produced by breakage of the upper electrode, occurrence of water marks, and sparkling on a high-definition display provided with the film.

Abstract: A hardcoat layer is a cured layer comprising a curable resin-precursor, a thermoplastic resin, and a fine particle having an average primary particle size of 1 to 100 nm, and the hardcoat layer is formed on at least one side of a transparent film. The thermoplastic resin may be a thermoplastic resin (particularly, a cellulose derivative) nonreactive to the curable resin-precursor. The ratio of the metal oxide fine particle is about 0.5 to 4 parts by weight relative to 100 parts by weight of the curable resin-precursor. The metal oxide fine particle may comprise at least one fine particle selected from the group consisting of antimony tin oxide, tin oxide, and zinc oxide. The curable resin-precursor may comprise a tetra- or more-functional precursor. The optical film of the present invention has excellent anti-glareness or anti-Newton-ring property and also has excellent abrasion resistance and mechanical properties.

Abstract: Anti-glare film including anti-glare layer. The anti-glare film is obtained by coating or casting a liquid composition containing a polymer, a curable resin precursor, and a solvent on a transparent plastic film, evaporating the solvent, forming a phase separation structure by spinodal decomposition, and curing the curable resin precursor by irradiation with light. The disclosed anti-glare film prevents reflection of surrounding scenery and dazzle in a display surface.

Abstract: Anti-glare film including anti-glare layer. The anti-glare film is obtained by coating or casting a liquid compositions containing a polymer, a curable resin precursor, and a solvent on a transparent plastic film, evaporating the solvent, forming a phase separation structure by spinodal decomposition, and curing the curable resin precursor by irradiation with light. The disclosed anti-glare film prevents reflection of surrounding scenery and dazzle in a display surface.

Abstract: Anti-glare film including anti-glare layer. The anti-glare film is obtained by coating or casting a liquid compositions containing a polymer, a curable resin precursor, and a solvent on a transparent plastic film, evaporating the solvent, forming a phase separation structure by spinodal decomposition, and curing the curable resin precursor by irradiation with light. The disclosed anti-glare film prevents reflection of surrounding scenery and dazzle in a display surface.

Abstract: An anti-glare film is obtained by forming a resin layer having a low refraction index on an anti-glare layer is obtained by coating a transparent plastic film with a liquid composition containing a polymer, a curable resin precursor, and a solvent, evaporating the solvent, forming a phase separation structure by spinodal decomposition, and curing the precursor with light irradiation. The anti-glare film has an uneven surface structure in the anti-glare layer, isotropically transmits and scatters an incident light to show the maximum value of the scattered light intensity at a scattering angle of 0.–10°, and has a total light transmittance of 70–100%. The film prevents dazzle or blur of images on a display surface, and reflection of a surrounding scenery, and improves contrast with reducing whitening of the display, even in a high definition display apparatus.

Abstract: An anti-glare film comprising an anti-glare layer is obtained by coating or casting a liquid composition containing a polymer, a curable resin precursor (e.g., an ultraviolet curable resin) and a solvent, on a transparent plastic film; evaporating the solvent; forming a phase separation structure by spinodal decomposition; and curing the curable resin precursor by a light irradiation to form the anti-glare layer. Thus obtained anti-glare layer has an uneven structure on the surface thereof, isotropically transmits and scatters an incident light to show the maximum value of the scattered light intensity at a scattering angle of 0.1 to 10°, and has the total light transmittance of 70 to 100%. Moreover, the anti-glare layer has the visibility of a transmitted image of 70 to 100% measured by an image clarity measuring apparatus provided with an optical slit of 0.5 mm width, and the haze of 20 to 50%. Abrasion resistance is imparted to the anti-glare layer by curing the curable resin precursor.

Abstract: An anti-glare film comprising an anti-glare layer is obtained by coating or casting a liquid composition containing a polymer, a curable resin precursor (e.g., an ultraviolet curable resin) and a solvent, on a transparent plastic film; evaporating the solvent; forming a phase separation structure by spinodal decomposition; and curing the curable resin precursor by a light irradiation to form the anti-glare layer. The result anti-glare layer has an uneven structure on the surface thereof, isotropically transmits and scatters an incident light to show the maximum value of the scattered light intensity at a scattering angle of 0.1 to 10°, and has the total light transmittance of 70 to 100%.

Abstract: An anti-glare layer is obtained by coating or casting a transparent plastic film with a liquid composition containing a polymer, a curable resin precursor (e.g., an ultraviolet curable resin) and a solvent, evaporating the solvent, forming a phase separation structure by spinodal decomposition, and curing the curable resin precursor with light irradiation or other means. On the anti-glare layer, a resin layer having a low refraction index is formed to give an anti-glare film. Thus obtained anti-glare film has an uneven surface structure in the anti-glare layer, isotropically transmits and scatters an incident light to show the maximum value of the scattered light intensity at a scattering angle of 0.1 to 10°, and has a total light transmittance of 70 to 100%. The low refraction index layer may comprise a fluorine-containing compound.

Abstract: An anti-glare film comprising an anti-glare layer is obtained by coating or casting a liquid composition containing a polymer, a curable resin precursor (e.g., an ultraviolet curable resin) and a solvent, on a transparent plastic film; evaporating the solvent; forming a phase separation structure by spinodal decomposition; and curing the curable resin precursor by a light irradiation to form the anti-glare layer. Thus obtained anti-glare layer has an uneven structure on the surface thereof, isotropically transmits and scatters an incident light to show the maximum value of the scattered light intensity at a scattering angle of 0.1 to 10°, and has the total light transmittance of 70 to 100%. Moreover, the anti-glare layer has the visibility of a transmitted image of 70 to 100% measured by an image clarity measuring apparatus provided with an optical slit of 0.5 mm width, and the haze of 20 to 50%. Abrasion resistance is imparted to the anti-glare layer by curing the curable resin precursor.