Abstract: According to one embodiment, a sensor includes a base, a fixed portion fixed to the base, and an element portion. The fixed portion includes a first wiring fixed portion and a first fixed portion. The element portion includes a first wiring portion supported by the first wiring fixed portion and including a first wiring, a first support member supported by the first fixed portion, a first intermediate member connected to the first wiring portion and the first support member, and a movable portion connected to the first intermediate member. The movable portion includes a first movable conductive layer electrically connected to the first wiring. A first gap is provided between the base and the element portion. A second direction from the first wiring fixed portion to the first intermediate member crosses a first direction from the base to the first wiring fixed portion.

Abstract: An electrochemical device includes a housing, a first electrochemical element present inside the housing and a porous structure occupying at least a part of the inside of the housing.

Abstract: According to one embodiment, a sensor includes a sensor portion that includes a first resistance element, a first opposing resistance element, a second resistance element, a second opposing resistance element, a third resistance element, a third opposing resistance element, a fourth resistance element, a fourth opposing resistance element, and a first conductive member. A direction from the first resistance element to the first opposing resistance element and a direction from the second resistance element to the second opposing resistance element are along a first direction. A second direction from at least a part of the first resistance element to the second resistance element crosses the first direction. A third direction from the third resistance element to the third opposing resistance element crosses a plane including the first and second directions. A direction from the fourth resistance element to the fourth opposing resistance element is along the third direction.

Abstract: According to one embodiment, a sensor includes a sensor section and a circuit section. The sensor section includes an element portion including a sensor element and a conductive member. The circuit section includes a first differential circuit, a voltage holding circuit, a first switch, a second switch, a third switch, and a controller. The controller is configured to perform a first operation and a second operation. In the first operation, the controller is configured to set the third switch to a third connected state, to set the first switch to a first connected state, and to set the second switch to a second disconnected state. In the second operation, the controller is configured to set the third switch to a third disconnected state, to set the first switch to a first disconnected state, and to set the second switch to a second connected state.

Abstract: According to one embodiment, a sensor includes a sensor section and a circuit section. The sensor section includes a first element portion including a first resistance element and a first conductive member, and a second element portion including a second resistance element. The circuit section includes a detector and a controller, and is configured to perform a first operation. The controller controls a first power in the first operation based on a second signal corresponding to a second resistance of the second resistance element. In the first operation: the controller supplies the first power to the first conductive member to increase a first temperature of the first element section; and the detector outputs a detected value corresponding to a difference between the second signal and a first signal corresponding to a first resistance of the first resistance element in a first state in which the first temperature is raised.

Abstract: According to one embodiment, a hydrogen sensor is disclosed. The hydrogen sensor includes a capacitor, a gas detector, a heater, and a determiner. The capacitor includes a deformable member that deforms by absorbing or adsorbing hydrogen and varies a capacitance value corresponding to a deformation of the deformable member. The gas detector detects gas based on a capacitance value of the capacitor. The heater heats the deformable member. The determiner determines whether gas detected by the gas detector contains a substance other than hydrogen or not, wherein the gas detector detects the gas during a heating period during which the heater heats the deformable member.

Abstract: An electrochemical device includes a housing, a first member and a second member provided between the housing and the first member. The housing has a first through hole including a first opening that faces the first member. The second member has a second through hole including a second opening.

Abstract: According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member provided between the first resistance layer and the first conductive layer. A potential of the first conductive member is fixed. A first electrical resistance of the first resistance layer is configured to change according to a state of a detection target around the first element.

Abstract: According to one embodiment, a sensor includes an element portion including a first base and a first element. The first element includes, a first fixed member fixed to the first base, a first resistance connecting member supported by the first fixed member, a first conductive connecting member supported by the first fixed member, and a first film portion supported by the first resistance connecting member and the first conductive connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer and a first conductive layer. The first resistance connecting member includes a first resistance wiring electrically connected to the first resistance layer. The first conductive connecting member includes a first conductive wiring electrically connected to the first conductive layer.

Abstract: According to one embodiment, a sensor includes an element section including a first base and a first element. The first element includes a first fixed member fixed to the first base, a first connecting member supported by the first fixed member, and a first film portion supported by the first connecting member. A first gap is provided between the first base and the first film portion. The first film portion includes a first resistance layer, a first conductive layer, and a first conductive member. The first resistance layer does not overlap the first conductive layer in a first direction from the first base to the first fixed member. The first conductive member overlaps the first resistance layer and the first conductive layer in the first direction. A first electrical resistance of the first resistance layer changes according to a state of a detection target around the first element.

Abstract: According to one embodiment, a sensor includes a first sensor part. The first sensor part includes a first electrode, a first counter electrode, and a first intermediate layer located between the first electrode and the first counter electrode. The first counter electrode includes a first electrode side surface. The first electrode side surface crosses a first cross direction. The first cross direction crosses a first direction from the first electrode toward the first counter electrode. The first intermediate layer includes a first intermediate layer side surface. The first intermediate layer side surface crosses the first cross direction. The first intermediate layer side surface is recessed when referenced to the first electrode side surface.

Abstract: According to one embodiment, a sensor includes a base including a first region and a second region; and a first sensor section. The first sensor section includes a first support portion fixed to the first region, a first structure, and a first film portion. The first structure is supported by the first support portion. The first structure includes a first resistance member. A first direction from the second region to the first structure crosses a second direction from the first region to the second region. The first film portion is fixed to the first region. A first gap is provided between the second region and the first film portion. A second gap is provided between the first film portion and the first structure.

Abstract: According to one embodiment, a filter includes a first layer and a second layer. The first layer includes a first resin provided with a plurality of holes. The first layer includes a first face. At least a part of the plurality of holes reaches the first face. The second layer includes a second resin. The second resin blocks at least a part of the plurality of holes reaching the first face.

Abstract: According to one embodiment, a data processing device includes an acquisitor and a processor. The acquisitor can acquire a first concentration signal obtained from a first concentration sensor configured to detect a first concentration of a first target substance included in a first output gas and a first flow rate signal obtained from a first flow rate sensor configured to detect a first flow rate of the first output gas. The processor can derive a first concentration value corresponding to the first concentration based on the first concentration signal. The processor can derive a first corrected conversion coefficient obtained by correcting a first conversion coefficient regarding a relationship between the first flow rate signal and the first flow rate based on the first concentration value. The processor can derive a first flow rate value corresponding to the first flow rate based on the first flow rate signal.

Abstract: According to one embodiment, a sensor includes a detection device and a circuit portion. The detection device includes a first detection portion and a second detection portion. The first detection portion includes a first detection element. The first detection element includes a first conductive member and a first detection member. The second detection portion includes a second detection element. The second detection element includes a second conductive member and a second detection member. The circuit portion is configured to execute a first detection portion operation for outputting a first detection result corresponding to a first detection value based on the first detection member when a first current is supplied to the first conductive member. In a case where a first evaluation value is not within a first range, the circuit portion is configured to execute a second detection portion operation by the second detection portion.

Abstract: According to one embodiment, a sensor includes a base, first to third detection parts. The base includes first to third base regions. The first detection part includes a first detection element. A first gap is provided between the first base region and the first detection element. The second detection part includes a second detection element. A second gap is provided between the second base region and the second detection element. The third detection part includes a third detection element. The third detection element includes a third resistance member, a third other resistance member, and a third conductive member. The third conductive member is between the third resistance member and the third other resistance member. A third gap is provided between the third base region and the third detection element.

Abstract: According to one embodiment, a sensor includes a detection device, a switch circuit, and a detection circuit. The detection device includes a first detection section and a second detection section. The first detection section includes a first detection element. The first detection element includes a first conductive member and a first resistance member. The second detection section includes a second detection element. The second detection element includes a second conductive member and a second resistance member. In a first operation, the switch circuit is configured to supply a first current to the first conductive member and not to supply the first current to the second conductive member, and the detection circuit is configured to output a first signal corresponding to a difference between a first electrical resistance of the first resistance member and a second electrical resistance of the second resistance member.

Abstract: According to one embodiment, a sensor includes a sensor part including a first film, and a structure body including a second film. The first film has a first density, and a first concentration of a first element. The second film has at least one of a second density, or a second concentration of the first element. The second concentration is greater than the first concentration. The second density is greater than the first density.

Abstract: According to one embodiment, a sensor system includes a pipe and a sensor. The sensor is configured to detect a detection target substance in the pipe. The sensor includes a base, a first detection part, and a second detection part. The base includes a first base region and a second base region. The first detection part includes a first support part, a first connection part, and a first detection element. The second detection art includes a second support part, a second connection part, and a second detection element.

Abstract: A sensor includes a handhole part and a sensor module. The handhole part includes an inner wall and a holder. The holder is located at the inner wall. The sensor module is provided in the handhole part. The sensor module includes a held part held by the holder, a housing connected with the held part, a sensor circuit provided in the housing and including a gas sensor element, and a battery configured to supply electrical power to the sensor circuit. A gap is between the inner wall and the housing and between the housing and a first member under the housing.