Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract: A MEMS device of an aspect of the present invention including a MEMS element includes a first lower electrode provided on a substrate, a first insulator which is provided on the upper surface of the first lower electrode, and has a first thickness, and a movable first upper electrode supported by an anchor in midair above the first lower electrode, and a capacitance element includes a second lower electrode provided on the substrate, a second insulator which is provided on the upper surface of the second lower electrode, and has a second thickness, and a second upper electrode provided on the second insulator, wherein the second thickness is less than the first thickness.

Abstract: An electrical component capable of performing hot switching at low power consumption is disclosed. The electrical component has a first electrical component and a second electrical component connected in parallel to the first electrical component. The first electrical component includes a first electrode and a second electrode facing the first electrode with a space in between, the second electrode is moved by a first actuator portion. The second electrical component includes a third electrode and a fourth electrode facing the third electrode with a space in between, the fourth electrode is moved by a second actuator portion having a stiffness higher than a stiffness of the first actuator portion, the second electrical component has an impedance becoming higher or lower than an impedance of the first electrical component depending on a moving state of the fourth electrode.

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract: A micro movable device includes a protection cap for protecting a movable unit arranged above a semiconductor substrate and the movable unit, signal line for transmitting a high-frequency signal formed above the semiconductor substrate, and insulation layer that has projection formed to project upward from the semiconductor substrate and coated surfaces with the signal line.

Abstract: A MEMS device comprises a substrate, an island-shaped first insulating layer formed on the substrate, a second insulating film formed on the top and side surfaces of the first insulating layer and the top surface of the substrate, and having a thickness smaller than that of the first insulating layer, a metal layer formed on the second insulating film in an island-shaped region where the first insulating layer is formed, and a MEMS system element formed on the metal layer.

Abstract: A high frequency MEMS 1 as a high frequency electrical element has a silicon substrate 2 wholly formed with an insulation film, a first signal line 4 provided on the silicon substrate 2, a second signal line 5 provided on the silicon substrate 2, the second signal line 5 crossing the first signal line 4 within a first region above the silicon substrate 2, and a dielectric film 9 interposed between the first signal line 4 and the second signal line 5, and provided on one of the first signal line 4 and the second signal line 5, within the first region, the first signal line 4 and the second signal line 5 being relatively movable in directions for a contacting approach and a mutual spacing in between.

Abstract: One aspect of the present invention can include a vehicular seat including a reclining apparatus capable of adjusting an angle of a seat back relative to a seat cushion, a tilt down mechanism capable of moving the seat cushion in a lower direction toward a vehicular floor when the seat back is moved onto the seat cushion, a walk in mechanism capable of positioning the seat back relative to the seat cushion at a forward tilting angle, a base member provided on a side of the vehicular floor, a middle member provided between the base member and the seat back.

Abstract: An electrostatic actuator includes first and second lower electrodes formed apart from each other above a substrate, an electrode portion formed above the first and second lower electrodes and first and second upper electrodes, a distance between the first upper electrode and the first lower electrode at a first portion being greater than that at a second portion, a distance between the second upper electrode and the second lower electrode at a third portion being greater than that at a fourth portion, a first boundary portion between the first and third upper electrodes having a convex shape, a second boundary portion between the second and third upper electrodes having a convex shape, and the electrode portion driving the third upper electrode, and first and second layers formed in the first and second boundary portions.

Abstract: A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

Abstract: An electromagnetic relay having a moving contact plate and fixed contact plates juxtaposed with one another on a base. A moving iron plate is rotated during magnetization/demagnetization of a coil block put on the base to reciprocate a card in a horizontal direction. The moving contact plate is allowed to undergo elastic deformation so that a contact on the moving contact plate is brought into contact and out of contact with contacts on the fixed contact plates. The top corners of the moving contact plate is bent into an upper component and a lower components in such a fashion as to form card acceptance portions, and a distal end portion of the card is brought into contact with an inner surface of the card acceptance portions.

Abstract: An electromagnetic relay makes it difficult for deformation due to impact force to easily occur even when bending work is applied to a contact plate. A coil block is put on a base and a moving contact plate and fixed contact plates are so juxtaposed as to oppose one another. The moving contact plate is constituted by a contact-fitting portion to which a moving contact is fixed, a push-in fixing portion which is pushed in and fixed to the base and from which terminal portions extend, and a connection portion for connecting the contact-fitting portion and the push-in fixing portion. The connection portion has a width smaller than those of the contact-fitting portion and the push-in fixing portion.

Abstract: An electromagnetic relay prevents appropriately invasion of a sealant. A coil block 3 produced by winding a coil 29 on a core 27 through a spool 28 and connecting the coil 29 to coil terminals 42 disposed at flanges 28a and 28b of the spool 28 is put onto a base 1. The through-holes 15 are sealed under the state where the coil terminals 42 protrude from the through-holes 15 formed in the base 1. An attraction surface 27a of the plate 27 is positioned on the side of the base 1 so that a moving iron plate 32 can be attracted and operated between the coil block 3 and the base 1. An increased thickness portion 41 into which the coil terminal 42 can be pushed is formed in each flange 28a, 28b of the spool 28 and a recess 43 for storing a sealant entering inside from the through-hole 15 is formed around the coil terminal 42.

Abstract: A cephem compound or pharmaceutically acceptable salt thereof represented by the formula I: wherein R1 and R2 may be the same or different and each represent hydrogen atom, nitro or cyano; R3 represents C1-C6 alkyl which may be substituted with carboxyl; R4 represents hydrogen atom or amino; X represents —S— or —SO—, there being no case where both of R1 and R2 are simultaneously hydrogen atom.

Abstract: An electromagnetic relay prevents appropriately invasion of a sealant. A coil block 3 produced by winding a coil 29 on a core 27 through a spool 28 and connecting the coil 29 to coil terminals 42 disposed at flanges 28a and 28b of the spool 28 is put onto a base 1. The through-holes 15 are sealed under the state where the coil terminals 42 protrude from the through-holes 15 formed in the base 1. An attraction surface 27a of the plate 27 is positioned on the side of the base 1 so that a moving iron plate 32 can be attracted and operated between the coil block 3 and the base 1. An increased thickness portion 41 into which the coil terminal 42 can be pushed is formed in each flange 28a, 28b of the spool 28 and a recess 43 for storing a sealant entering inside from the through-hole 15 is formed around the coil terminal 42.

Abstract: An electromagnetic relay makes it difficult for deformation due to impact force to easily occur even when bending work is applied to a contact plate. A coil block is put on a base and a moving contact plate and fixed contact plates are so juxtaposed as to oppose one another. The moving contact plate is constituted by a contact-fitting portion to which a moving contact is fixed, a push-in fixing portion which is pushed in and fixed to the base and from which terminal portions extend, and a connection portion for connecting the contact-fitting portion and the push-in fixing portion. The connection portion has a width smaller than those of the contact-fitting portion and the push-in fixing portion.

Abstract: An electromagnetic relay acquires a satisfactory operation without generating wear dust, though having a simple construction. A moving contact plate and fixed contact plates are juxtaposed with one another on a base. A moving iron plate is rotated on the basis of magnetization/demagnetization of a coil block put on the base to reciprocate a card in a horizontal direction. The moving contact plate is allowed to undergo elastic deformation so that a moving contact provided to the moving contact plate is brought into contact with and out of contact from fixed contacts and provided to the fixed contact plates. An upper end portion of the moving contact plate is bent in such a fashion as to form card acceptance portions positioned at least at upper and lower positions, and a distal end portion of the card is brought into contact with an inner surface of the card acceptance portions.

Abstract: A cephem compound or pharmaceutically acceptable salt thereof represented by the formula I: 1