Abstract: A mounting beam removal equipment has a cassette for holding a plurality of stacked wafers in such a manner that mounting beams of the wafers are trued up in the same direction, a brush composed of a plurality of disks which are inclined at a predetermined angle and secured to a vertical shaft along an axis of the vertical shaft at regular intervals, the brush facing a side of the mounting beams of the wafers held in said cassette. Furthermore, a rotation driving device is provided for rotating the brush about the axis of said vertical shaft, a first moving device is provided for moving the brush horizontally along the side of the mounting beams, and a second moving device is provided for moving the brush horizontally in a direction perpendicular to the side of the mounting beams.