Abstract: To predict the service life of a construction machine more accurately, and to make it possible to draw up an appropriate overhaul implementation plan at an early stage. A first service life prediction unit 311 predicts the service lives of main components such as an engine and the like, based upon their actual wear states. And a second service life prediction unit 312 predicts the service lives of the same components, based upon their cumulative load amounts. An order setting unit 320 selects the ones of these two predicted service lives which are the shorter, and sets a priority order for overhaul in order of shortness of predicted service life. An overhaul schedule table generation unit 330 creates a schedule table D1 based upon this priority order. The contents of this schedule table D1 are decided upon by a judgment unit 340, and, if necessary, are corrected by a correction unit 341.

Abstract: A maintenance support system for a construction machine calculates the cumulative load of every component corresponding with the driving and working conditions of the construction machine by a load calculation means after simulating the driving and working conditions on the basis of production operating conditions by an operation simulation means, and forecasts the lifespan of the respective components by a lifespan calculation means on the basis of the cumulative load. Hence, a more accurate maintenance schedule can be established in comparison with a case where which component is to be maintained is determined on the basis of only the operating time.

Abstract: A first service life prediction unit 311 predicts the service lives of main components, such as an engine, based upon their actual wear states. A second service life prediction unit 312 predicts the service lives of the same components, based upon their cumulative load amounts. An order setting unit 320 selects the shorter predicted service lives and sets a priority order for overhaul based thereon. An overhaul schedule table generation unit 330 creates a schedule table D1 based upon this priority order. The contents of this schedule table D1 are corrected, if necessary, by a correction unit 341. A plan creation unit 350 creates an overhaul implementation plan document D2 and the like, based upon the corrected schedule table D1a. The result of the overhaul task and the present states of components are tested, and these test results are reflected by the service life prediction units 311 and 312.

Abstract: The present invention provides a maintenance support system for a construction machine that allows a components maintenance schedule to be accurately established. The system 1 calculates the cumulative load of every component corresponding with the driving and working conditions of the construction machine 3 by means of the load calculation means 13 after simulating the driving and working conditions on the basis of production operating conditions by means of the operation simulation means 12, and forecasts the lifespan of the respective components by means of the lifespan calculation means 14 on the basis of the cumulative load. Hence, a more accurate maintenance schedule can be established in comparison with a case where which component is to be maintained is determined on the basis of only the operating time as in the prior art. The possibility of an unexpected component anomaly occurring at an earlier stage than the predetermined lifespan can therefore be reduced.

Abstract: It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution information 30 for such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of “defective” status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device 11 (especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Abstract: It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11, by providing a means 21 for detecting aggregation of clustered point defects (LPD) from two-dimensional distribution information 30 for such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of “defective” status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device 11 (especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Abstract: The present invention provides a database for implementing in a straightforward manner the sharing of a variety of touchpoint information between departments in an enterprise or the sharing of a variety of touchpoint information between enterprises.