Patents by Inventor Hirobumi Takemura

Hirobumi Takemura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing equipment
    Patent number: 5340460
    Abstract: A vacuum processing equipment is disclosed, which comprises a vacuum chamber and main and fore vacuum pumping mechanism for pumping down the vacuum chamber. The fore vacuum pumping mechanism includes a cooling means and a residual gas trapping means coupled to the cooling means. The cooling means is provided outside the vacuum chamber. The residual gas trapping means is provided in a zone of the vacuum chamber free from interference with the vacuum processing.
    Type: Grant
    Filed: August 19, 1991
    Date of Patent: August 23, 1994
    Assignees: Anelva Corporation
    Inventors: Masahiko Kobayashi, Hirobumi Takemura, Tetsuo Ishida, Nobuyuki Takahashi