Patents by Inventor Hirochika Yamamoto

Hirochika Yamamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating and cooling apparatus for reaction chamber
    Patent number: 5892207
    Abstract: The present invention relates to a temperature regulation apparatus capable of easily regulating the temperature of a support for a substance to be treated, such as a semiconductor wafer.The temperature regulation apparatus includes a liquid nitrogen supply device for supplying liquid nitrogen into a temperature regulation space provided in the inside of a support so as to effect flashing of the liquid nitrogen. A heating device for heating the support and temperature sensors for detecting the temperature of the support are also provided. A temperature setting device sets the temperature of the support at a desired temperature and a controller controls the liquid nitrogen supply device and the heating device based on a temperature detected by the temperature sensors, so that the support reaches and is maintained at the set temperature.
    Type: Grant
    Filed: November 27, 1996
    Date of Patent: April 6, 1999
    Assignee: Teisan Kabushiki Kaisha
    Inventors: Hideki Kawamura, Hirochika Yamamoto, Yukinobu Nishikawa