Abstract: Provided is a block polymer including two or more polymer block As each having a value ? of 0.20 or less and a functional group F containing at least one element selected from a group consisting of nitrogen, silicon, oxygen, and sulfur in a part or all of terminals of the two or more polymer block As, in which the block polymer has a value ? of 0.75 or more, when p, q, r and s are defined as a component proportion (molar proportion) of a structural unit represented by Formula (1), a component proportion of a structural unit represented by Formula (2), a component proportion of a structural unit represented by Formula (3), and a component proportion of a structural unit represented by Formula (4), in the polymer, respectively.

Abstract: There is provided a polymer composition using which a molded product having excellent balance between rigidity, wear resistance, viscoelastic properties, and heat resistance can be obtained. A polymer composition according to the disclosure includes (A) a conjugated diene rubber (where, a polymer corresponding to the following component (B) is excluded); and (B) a hydrogenated product of a polymer that satisfies the following (1) to (3), which is a polymer in which 80% or more of structural units derived from butadiene are hydrogenated: (1) being a copolymer of a conjugated diene compound containing butadiene and an aromatic vinyl compound, (2) including a polybutadiene block having a vinyl group content of 20% or less, and (3) including a block composed of a conjugated diene compound and an aromatic vinyl compound.

Abstract: A biosensor capable of analyzing an object, such as antigen, antibody, DNA or RNA, through detection of magnetic field to thereby allow washout of unbound label molecules to be unnecessary, which biosensor is compact and available at low price, excelling in detection precision. Coils are arranged at an upper part and a lower part of a magnetic sensor using a hall element as a magnetic field detection element. An object and magnetic particles having an antibody capable of specific bonding with the object bound to the surface thereof are introduced in the magnetic sensor having a molecular receptor capable of specific bonding with the object attached to the surface thereof. Therefore, a change in magnetic field by magnetic particles bonded through the molecular receptor to the surface of the magnetic sensor is detected by means of the hall element.

Abstract: On the basis of both screen transition data showing a correspondence between data showing whether a screen transition among operation screens is enabled or disabled and screen identifiers each identifying one of the operation screens, and associated data showing a correspondence between a manual item identifier and a screen identifier identifying an operation screen for enabling an operation based on an operation item specified by the manual item identifier to be performed, an information-to-be-presented deriving unit derives an operation screen corresponding to a manual item identifier acquired by a browsing detecting unit 3, and then displays this operation screen on an equipment display unit 10.

Abstract: In a developing method, a developer is supplied onto a resist film provided on a substrate, made of a resist and having an upper surface on which design patterns having different mask opening ratios are exposed and a development reaction is caused to proceed on the resist film with the supplied developer. After the development, the substrate is rotated so that the developer and the resist dissolved in the developer are removed. Then, a rinsing solution is supplied onto the resist film subjected to development and the substrate is rotated, thereby washing out the developer and the resist dissolved in the developer. The rotation speed of the substrate in removing the developer is a half or less of the rotation speed of the substrate in the rinsing step of washing out the resist.

Abstract: In a focus measurement method and a method of manufacturing a semiconductor device relating to the present invention, a focus value is obtained by using a fluctuation where shrinkage of a resist pattern by an electron beam irradiation depends upon the focus value. In the case of obtaining the focus value, the shrinkage of the resist pattern for a focus measurement formed by exposure to be subject for a focus value measurement is measured. The focus value corresponding to the shrinkage is obtained from the pre-obtained focal dependency of the shrinkage. A focal shift length can be defined from a difference between the focus value and a predetermined best focus value.

Abstract: In a focus measurement method and a method of manufacturing a semiconductor device relating to the present invention, a focus value is obtained by using a fluctuation where shrinkage of a resist pattern by an electron beam irradiation depends upon the focus value. In the case of obtaining the focus value, the shrinkage of the resist pattern for a focus measurement formed by exposure to be subject for a focus value measurement is measured. The focus value corresponding to the shrinkage is obtained from the pre-obtained focal dependency of the shrinkage. A focal shift length can be defined from a difference between the focus value and a predetermined best focus value.

Abstract: A biosensor capable of analyzing an object, such as antigen, antibody, DNA or RNA, through detection of magnetic field to thereby allow washout of unbound label molecules to be unnecessary, which biosensor is compact and available at low price, excelling in detection precision. Coils are arranged at an upper part and a lower part of a magnetic sensor using a hall element as a magnetic field detection element. An object and magnetic particles having an antibody capable of specific bonding with the object bound to the surface thereof are introduced in the magnetic sensor having a molecular receptor capable of specific bonding with the object attached to the surface thereof. Therefore, a change in magnetic field by magnetic particles bonded through the molecular receptor to the surface of the magnetic sensor is detected by means of the hall element.

Abstract: A plurality of first measurement patterns each including a protruding pattern formed of a resist film and a recessed pattern having a space with a shape corresponding to the protruding pattern are formed on a first substrate such that they have different focus values at a time of exposure, edge inclination amounts of the plurality of first measurement patterns are measured, and a focus dependence (17) of the edge inclination amounts is obtained based on correspondences (7) and (14) between the edge inclination amounts and the focus values. A second measurement pattern including the protruding pattern and the recessed pattern is formed on a second substrate so as to measure edge inclination amounts of the second measurement pattern, and a focus deviation amount deviating from a best focus at the time of exposure of the second measurement pattern is calculated from the edge inclination amounts of the second measurement pattern based on the focus dependence of the edge inclination amounts.

Abstract: A biosensor not requiring washing of an unbonded label molecular by analyzing an object to be measured such as an antigen, an antibody, a DNA, and an RNA through magnetic field sensing. The biosensor is small in size, low in price, and high in sensing accuracy. Semiconductor Hall devices are arrayed two-dimensionally on the bottoms of recesses in the surface of a sensor chip to which bonded is a magnetic molecule with which a magnetic particle is labeled so as to sense the magnetic field produced along the sensor surface of the sensor chip. The surface area of each semiconductor Hall device is less than the maximum cross section of the magnetic molecule, and the intervals of the arrayed semiconductor Hall devices are larger than the diameter of the magnetic Hall molecule. Thus, the analysis accuracy is enhanced. An interconnection is used commonly to the semiconductor Hall devices, thereby reducing the size of the sensor.

Abstract: In a developing method, a developer is supplied onto a resist film provided on a substrate, made of a resist and having an upper surface on which design patterns having different mask opening ratios are exposed and a development reaction is caused to proceed on the resist film with the supplied developer. After the development, the substrate is rotated so that the developer and the resist dissolved in the developer are removed. Then, a rinsing solution is supplied onto the resist film subjected to development and the substrate is rotated, thereby washing out the developer and the resist dissolved in the developer. The rotation speed of the substrate in removing the developer is a half or less of the rotation speed of the substrate in the rinsing step of washing out the resist.

Abstract: A biosensor capable of analyzing an object, such as antigen, antibody, DNA or RNA, through detection of magnetic field to thereby allow washout of unbound label molecules to be unnecessary, which biosensor is compact and available at low price, excelling in detection precision. Coils are arranged at an upper part and a lower part of a magnetic sensor using a hall element as a magnetic field detection element. An object and magnetic particles having an antibody capable of specific bonding with the object bound to the surface thereof are introduced in the magnetic sensor having a molecular receptor capable of specific bonding with the object attached to the surface thereof. Therefore, a change in magnetic field by magnetic particles bonded through the molecular receptor to the surface of the magnetic sensor is detected by means of the hall element.

Abstract: A plurality of first measurement patterns each including a protruding pattern formed of a resist film and a recessed pattern having a space with a shape corresponding to the protruding pattern are formed on a first substrate such that they have different focus values at a time of exposure, edge inclination amounts of the plurality of first measurement patterns are measured, and a focus dependence (17) of the edge inclination amounts is obtained based on correspondences (7) and (14) between the edge inclination amounts and the focus values. A second measurement pattern including the protruding pattern and the recessed pattern is formed on a second substrate so as to measure edge inclination amounts of the second measurement pattern, and a focus deviation amount deviating from a best focus at the time of exposure of the second measurement pattern is calculated from the edge inclination amounts of the second measurement pattern based on the focus dependence of the edge inclination amounts.

Abstract: A tilt sensor capable of measuring a tilt angle by utilizing piezoresistive effect without selectively etching a substrate having piezoresistors formed therein, wherein the backside of the silicon substrate 1 having piezoresistors R1 to R4 formed therein is uniformly ground to a deflectable thickness, both ends of the silicon substrate 1 are supported by a support member 2, and a weight member 3 is provided at the center of the silicon substrate 1 through a convex portion 3a.

Abstract: A biosensor not requiring washing of an unbonded label molecular by analyzing an object to be measured such as an antigen, an antibody, a DNA, and an RNA through magnetic field sensing. The biosensor is small in size, low in price, and high in sensing accuracy. Semiconductor Hall devices are arrayed two-dimensionally on the bottoms of recesses in the surface of a sensor chip to which bonded is a magnetic molecule with which a magnetic particle is labeled so as to sense the magnetic field produced along the sensor surface of the sensor chip. The surface area of each semiconductor Hall device is less than the maximum cross section of the magnetic molecule, and the intervals of the arrayed semiconductor Hall devices are larger than the diameter of the magnetic Hall molecule. Thus, the analysis accuracy is enhanced. An interconnection is used commonly to the semiconductor Hall devices, thereby reducing the size of the sensor.

Abstract: This invention comprises an inspection method conducted by rotary-coating a photoresist on the surface of a semiconductor substrate, irradiating ultraviolet rays using an exposure instrument such as a stepper, exposing the entire photoresist, removing the exposed photoresist using an alkali developing solution, and irradiating a laser beam onto the semiconductor substrate to detect foreign substances through the scattered light. Accordingly, gel foreign substances remain on the semiconductor substrate even after the steps of exposure and development, so that their presence can be detected surely. Furthermore, this invention provides a method and an apparatus of surely detecting gel foreign substances which are present in a photoresist film or between patterns by exposing the photoresist and performing etching and ashing, using gel foreign substances which remained through the development as a mask.