Patents by Inventor Hirofumi Iijima
Hirofumi Iijima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11222764Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.Type: GrantFiled: March 23, 2020Date of Patent: January 11, 2022Assignee: JEOL Ltd.Inventors: Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi
-
Patent number: 11133151Abstract: A transmission electron microscope includes an electron beam source emitting an electron beam and an illumination optical system for directing the emitted electron beam at a sample. The illumination optical system has a first condenser lens, a second condenser lens, a third condenser lens, a fourth condenser lens, an objective lens, and a condenser aperture disposed at the position of the second condenser lens. The third condenser lens and the fourth condenser lens cooperate to make the position of the condenser aperture and a sample plane conjugate to each other. The first condenser lens and the second condenser lens cooperate to make the electron beam source and a front focal plane of the objective lens conjugate to each other while the conjugate relationship between the position of the condenser aperture and the sample plane is maintained by the third and fourth condenser lenses.Type: GrantFiled: November 12, 2020Date of Patent: September 28, 2021Assignee: JEOL Ltd.Inventor: Hirofumi Iijima
-
Publication number: 20210151286Abstract: A transmission electron microscope includes an electron beam source emitting an electron beam and an illumination optical system for directing the emitted electron beam at a sample. The illumination optical system has a first condenser lens, a second condenser lens, a third condenser lens, a fourth condenser lens, an objective lens, and a condenser aperture disposed at the position of the second condenser lens. The third condenser lens and the fourth condenser lens cooperate to make the position of the condenser aperture and a sample plane conjugate to each other. The first condenser lens and the second condenser lens cooperate to make the electron beam source and a front focal plane of the objective lens conjugate to each other while the conjugate relationship between the position of the condenser aperture and the sample plane is maintained by the third and fourth condenser lenses.Type: ApplicationFiled: November 12, 2020Publication date: May 20, 2021Inventor: Hirofumi Iijima
-
Publication number: 20200343072Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.Type: ApplicationFiled: March 23, 2020Publication date: October 29, 2020Inventors: Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi
-
Patent number: 10741358Abstract: An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.Type: GrantFiled: June 27, 2019Date of Patent: August 11, 2020Assignee: JEOL Ltd.Inventors: Yuko Shimizu, Hirofumi Iijima, Naoki Hosogi, Jun Yamashita
-
Publication number: 20200013582Abstract: An electron microscope comprises: an electron microscope main body including a phase plate that imparts a phase change to an electron wave, a moving mechanism that moves the phase plate, and a detector that acquires an image formed by an electron beam transmitted through a sample; and a control unit that controls the electron microscope main body. The control unit performs a phase plate image acquisition process of acquiring a phase plate image which is an image of the phase plate; an unevenness determination process of determining whether or not the phase plate has unevenness based on the phase plate image; and a moving mechanism control process of moving the phase plate by controlling the moving mechanism when the control unit has determined that the unevenness is present.Type: ApplicationFiled: June 27, 2019Publication date: January 9, 2020Inventors: Yuko Shimizu, Hirofumi Iijima, Naoki Hosogi, Jun Yamashita
-
Patent number: 9786467Abstract: A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.Type: GrantFiled: March 11, 2016Date of Patent: October 10, 2017Assignee: JEOL Ltd.Inventor: Hirofumi Iijima
-
Publication number: 20160276125Abstract: A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.Type: ApplicationFiled: March 11, 2016Publication date: September 22, 2016Inventor: Hirofumi Iijima
-
Patent number: 9310596Abstract: A compound microscope device allows simultaneous observation of one specimen by a transmission electron microscope and an optical microscope. The compound microscope device 1 of the present invention has a transmission electron microscope 2 and an optical microscope 4. A specimen 10 and a reflection mirror 41 are disposed on an electron optical axis C of an electron ray. The reflection mirror 41 is inclined from the electron optical axis C toward the optical object lens 43 and the specimen 10. Light from the specimen 10 (fluorescent light, reflection light, and the like) is reflected by the reflection mirror 41 and enters into the optical object lens 43. The electron ray from the electron microscope 2 passes through a mounting center hole 42 of the reflection mirror 41. This makes it possible to observe one specimen simultaneously by the electron microscope 2 and the optical microscope 4.Type: GrantFiled: April 6, 2011Date of Patent: April 12, 2016Assignees: INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTE OF NATURAL SCIENCES, JEOL LTD.Inventors: Kuniaki Nagayama, Yoshihiro Arai, Hirofumi Iijima, Susumu Terakawa
-
Patent number: 9196456Abstract: An image acquisition method and system for use in transmission electron microscopy and capable of providing information about a wide range of frequency range. The method is initiated with setting at least one of the spherical aberration coefficient and chromatic aberration coefficient of the imaging system of the microscope to suppress attenuation of a contrast transfer function due to an envelope function. Then, an image is obtained by the imaging system placed in defocus conditions.Type: GrantFiled: October 8, 2014Date of Patent: November 24, 2015Assignee: JEOL Ltd.Inventor: Hirofumi Iijima
-
Publication number: 20150136980Abstract: An image acquisition method and system for use in transmission electron microscopy and capable of providing information about a wide range of frequency range. The method is initiated with setting at least one of the spherical aberration coefficient and chromatic aberration coefficient of the imaging system of the microscope to suppress attenuation of a contrast transfer function due to an envelope function. Then, an image is obtained by the imaging system placed in defocus conditions.Type: ApplicationFiled: October 8, 2014Publication date: May 21, 2015Inventor: Hirofumi Iijima
-
Patent number: 8829436Abstract: A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S100) of forming a first layer on a substrate, a step (S102) of patterning the first layer to form through-holes extending through the first layer, a step (S104) of etching the surface of the substrate opposite to the surface on which the first layer is formed to form an opening which is in communication with the through-holes and which exposes the first layer, and a step (S106) of forming a second layer on the first layer.Type: GrantFiled: December 23, 2013Date of Patent: September 9, 2014Assignee: JEOL Ltd.Inventors: Hirofumi Iijima, Yuji Konyuba
-
Publication number: 20140183358Abstract: A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S100) of forming a first layer on a substrate, a step (S102) of patterning the first layer to form through-holes extending through the first layer, a step (S104) of etching the surface of the substrate opposite to the surface on which the first layer is formed to form an opening which is in communication with the through-holes and which exposes the first layer, and a step (S106) of forming a second layer on the first layer.Type: ApplicationFiled: December 23, 2013Publication date: July 3, 2014Applicant: JEOL Ltd.Inventors: Hirofumi Iijima, Yuji Konyuba
-
Publication number: 20130088775Abstract: A compound microscope device allowing simultaneous observation of one specimen by a transmission electron microscope and an optical microscope, is provided. A compound microscope device 1 of the present invention has a transmission electron microscope 2 and an optical microscope 4. A specimen 10 and a reflection mirror 41 are disposed on an electron optical axis C of an electron ray. The reflection mirror 41 is inclined from the electron optical axis C toward the optical object lens 43 and the specimen 10. Light from the specimen 10 (fluorescent light, reflection light, and the like) is reflected by the reflection mirror 41 and entered into the optical object lens 43. The electron ray from the electron microscope 2 passes through a mounting center hole 42 of the reflection mirror 41. This makes it possible to observe one specimen simultaneously by the electron microscope 2 and the optical microscope 4.Type: ApplicationFiled: April 6, 2011Publication date: April 11, 2013Inventors: Kuniaki Nagayama, Yoshihiro Arai, Hirofumi Iijima, Susumu Terakawa