Abstract: Wastewater, in the form of a colloidal solution containing microparticles, is filtrated using a second filter, having a gel film that is formed by suction on the surface of a first filter. The suction pressure in this process is made extremely weak to maintain the filtration capacity while extending intervals prior to clogging of second filter. Furthermore, the gel that becomes adsorbed onto the surface of second filter can be separated readily from the surface of second filter by stopping the suction and filtration can be continued again thereafter.

Abstract: Object of the preferred embodiment is to remove sol-form microparticles and nitrogen components contained in CMP wastewater. Sol-form microparticle components contained in CMP wastewater are removed by a filtration treatment using a filter device 13, having a gel-form second filter. Also, nitrogen components in the CMP wastewater are removed by an electrochemical treatment using electrode 12. The filtration treatment and the electrochemical treatment can be carried out in individual tanks or can be carried out in the same tank. By performing the filtration treatment and the electrochemical treatment in the same tank, a space-saving water treatment device can be provided.

Abstract: A filtering method is directed to a wastewater of CMP process, which includes sub-micrometer particles suspended as colloid. The wastewater is filtered by a gel membrane formed on a surface of plastic filter. A coagulant or a pH adjuster is added to the wastewater so that the sub-micrometer particles are coagulated to form the gel membrane.

Abstract: Techniques for recycling waste particles may include solidifying particles, which were generated by machining a crystal ingot into a wafer or by machining a semiconductor wafer, into a cake, and melting the cake, for example, into an ingot.

Abstract: A filtration device is provided in which wastewater, in the form of a colloidal solution containing microparticles, is guided to tank, circulated, and filtrated using a second filter. The device includes a gel film that is formed by suction on the surface of a first filter. The suction pressure in this process is made extremely weak to maintain the filtration capacity while extending intervals prior to clogging of second filter 2. Furthermore, a filtration device is realized with which the gel film of second filter that becomes adsorbed onto the surface of first filter can be separated readily by stopping the suction and filtration can be continued again thereafter.

Abstract: Object of the preferred embodiment is to remove sol-form microparticles and nitrogen components contained in CMP wastewater. Sol-form microparticle components contained in CMP wastewater are removed by a filtration treatment using a filter device 13, having a gel-form second filter. Also, nitrogen components in the CMP wastewater are removed by an electrochemical treatment using electrode 12. The filtration treatment and the electrochemical treatment can be carried out in individual tanks or can be carried out in the same tank. By performing the filtration treatment and the electrochemical treatment in the same tank, a space-saving water treatment device can be provided.

Abstract: This method provide a method for fabricating a semiconductor device in which waste water generated by a step of processing a semiconductor is filtered to be clean. In the method, removables 12 trapped by a first filter film 10 are used as a second filter film 13, and clogging of the first filter film 10 is prevented, and an external force such as bubbles is applied to the second filter film 13 to maintain filtering capacity. And when removables are mixed with the filtered water, the filtered water is recirculated again to the tank in which the waste water is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: Waste water generated by processing a semiconductor is filtered to be cleaned. Removable matters trapped by a first filter film are used as a second filter film. Filtering capciity is maintained by applying an external force such as bubbles to the second filter film. When removable matters are mixed with the filtered water, the filtered water is recirculated again to the tank in which the waste water is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: A filtering method is directed to a wastewater of CMP process, which includes sub-micrometer particles suspended as colloid. The wastewater is filtered by a gel membrane formed on a surface of plastic filter. A coagulant or a pH adjuster is added to the wastewater so that the sub-micrometer particles are coagulated to form the gel membrane.

Abstract: Wastewater, in the form of a colloidal solution containing microparticles, is filtrated using a second filter, having a gel film that is formed by suction on the surface of a first filter. The suction pressure in this process is made extremely weak to maintain the filtration capacity while extending intervals prior to clogging of second filter. Furthermore, the gel that becomes adsorbed onto the surface of second filter can be separated readily from the surface of second filter by stopping the suction and filtration can be continued again thereafter.

Abstract: A colloidal solution containing micro-particles can be filtrated using a second filter, and includes a gel film that is formed by suction on the surface of a first filter. The suction pressure in this process is made extremely weak to keep the filtration rate fixed and to maintain the filtration capacity while extending intervals prior to clogging of the second filter. Micro-particles, mainly 0.15 &mgr;m or less, can thereby be removed.

Abstract: A filtration device is provided in which wastewater, in the form of a colloidal solution containing microparticles, is guided to tank, circulated, and filtrated using a second filter. The device includes a gel film that is formed by suction on the surface of a first filter. The suction pressure in this process is made extremely weak to maintain the filtration capacity while extending intervals prior to clogging of second filter 2. Furthermore, a filtration device is realized with which the gel film of second filter that becomes adsorbed onto the surface of first filter can be separated readily by stopping the suction and filtration can be continued again thereafter.

Abstract: A fluid is filtered by first preparing a filter which includes a base filter and solid substances provided on the base filter, such that the solid substances differ from objects within the fluid to be filtered that are removed by the filter. The objects of filtration are filtered by supplying the fluid to the filter. During filtration, a force is applied to the filter to move the solid substances and objects deposited on the filter. The application of such force thus allows continuous filtration through the filter. The force can take the form of application of rising bubbles, a mechanical vibration or sonic waves to the filter. The filtration method is useful in processing fluid waste from mechanical processes, such as CMP steps.

Abstract: Removables 12 trapped by a first filter film 10 are used as a second filter film 13, and clogging of the first filter film 10 is prevented, and an external force such as bubbles is applied to the second filter film 13 to maintain filtering capacity. And when removables are mixed with the filtered water, the filtered water is recirculated again to the tank in which the wastewater is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: According to the apparatus, removables 12 trapped by a first filter film 10 are used as a second filter film 13, and clogging of the first filter film 10 is prevented, and an external force such as bubbles is applied to the second filter film 13 to maintain filtering capacity. And when removables are mixed with the filtered water, the filtered water is recirculated again to the tank in which the wastewater is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: This method provide a method for fabricating a semiconductor device in which waste water generated by a step of processing a semiconductor is filtered to be clean. In the method, removables 12 trapped by a first filter film 10 are used as a second filter film 13, and clogging of the first filter film 10 is prevented, and an external force such as bubbles is applied to the second filter film 13 to maintain filtering capacity. And when removables are mixed with the filtered water, the filtered water is recirculated again to the tank in which the waste water is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: This method provide a method for fabricating a semiconductor device in which waste water generated by a step of processing a semiconductor is filtered to be clean. In the method, removables 12 trapped by a first filter film 10 are used as a second filter film 13, and clogging of the first filter film 10 is prevented, and an external force such as bubbles is applied to the second filter film 13 to maintain filtering capacity. And when removables are mixed with the filtered water, the filtered water is recirculated again to the tank in which the waste water is stored, and after it is checked that a desired inclusion rate has been reached filtration is started again.

Abstract: A heat exchanger having an improved and substantially uniform heat exchange efficiency, provided with a plurality of plate fins each of which has tube inserting bores arranged in a staggered manner, and heat transfer tubes inserted through these bores, a plurality of each of the fins which are between the tubes being cut doubly to a small width and raised so as to form louver elements so that the louver elements cross a flow of the air stream.