Abstract: A heat sink includes: a container having a cavity inside and a first surface and a second surface opposite the first surface; a working fluid encapsulated in the cavity; and a steam flow path in the cavity where the working fluid in a gas phase flows, the first surface having a flat part and a protruding part projecting from the flat part in an external direction, causing the container to have a flat portion and a protruding portion projecting from the flat portion in the external direction, an inner space of the protruding portion of the container being in communication with an inner space of the flat portion, causing the cavity to be formed, and a first heat radiating fin being provided on an exterior of the flat part of the first surface and a second heat radiating fin being provided on an exterior of the second surface.

Abstract: An exhaust gas processing method of the present invention includes sequentially introducing an exhaust gas from a semiconductor manufacturing equipment to a combustion-based detoxifying device, a dust collector, and a two-stage gas cleaning device, so as to process the exhaust gas, wherein the two-stage gas cleaning device is comprised of a first-stage gas cleaning device and a second-stage gas cleaning device, and gas cleaning is performed in the first gas cleaning device that uses water as a cleaning solution and subsequently in the second gas cleaning device that uses an alkaline aqueous solution as a cleaning solution.

Abstract: An exhaust gas processing method of the present invention includes sequentially introducing an exhaust gas from a semiconductor manufacturing equipment to a combustion-based detoxifying device, a dust collector, and a two-stage gas cleaning device, so as to process the exhaust gas, wherein the two-stage gas cleaning device is comprised of a first-stage gas cleaning device and a second-stage gas cleaning device, and gas cleaning is performed in the first gas cleaning device that uses water as a cleaning solution and subsequently in the second gas cleaning device that uses an alkaline aqueous solution as a cleaning solution.