Patents by Inventor Hirofumi Shibatya

Hirofumi Shibatya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic mask structure and process for preparing the same
    Patent number: 4804600
    Abstract: There is disclosed a lithographic mask structure including a mask support film, and a support substrate, wherein the peripheral portion of the mask support film is attached on the surface of the support substrate which has a groove.
    Type: Grant
    Filed: February 1, 1988
    Date of Patent: February 14, 1989
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideo Kato, Hirofumi Shibatya, Keiko Matsuda