Patents by Inventor Hiroharu Fujise

Hiroharu Fujise has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF COATING RESIST AND RESIST COATING APPARATUS
    Publication number: 20140234773
    Abstract: An aspect of the present embodiment, there is provided a method of coating resist, including providing solvent on a substrate to be processed being set to be nearly still, and rotating the substrate to be processed to provide resist solution on the substrate to be processed from a resist supply nozzle in a state that a top edge of the resist supply nozzle is inserted into the solvent.
    Type: Application
    Filed: February 14, 2014
    Publication date: August 21, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Katsunori SUZUKI, Seiji Nakagawa, Hiroharu Fujise