Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A control device of a robot includes: an image data acquirer acquiring image data taken by a camera, the image data including a hand teaching substrate and substrate placing portion, the teaching substrate arranged as a teaching target at a substrate target position; a virtual substrate information generator generating information of a virtual substrate virtually arranged at the hand substrate placing portion in the image data; an operating unit receiving an input and generate operation information corresponding to the input; a screen display unit displaying an image of the teaching substrate and an image of the virtual substrate on a screen; a robot operation control unit controlling an operation of the robot arm in accordance with the operation information; and a teaching data record unit storing, as teaching data, a position of the hand when the virtual substrate has coincided with the teaching substrate.

Abstract: A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

Abstract: Autonomous driving assistance systems, methods, and programs obtain lane information of a road on which a vehicle is traveling, and set a planned target section for which a lane change plan of the vehicle is to be created. The systems, methods, and programs obtain, for each lane, an obstructive factor present on the road on which the vehicle is traveling and that obstructs continuation of autonomous driving assistance executed on the vehicle, and set, for each obtained obstructive factor, an avoidance route that passes through a lane avoiding the obstructive factor. The systems, methods, and programs create a lane change route that defines the lane change plan of the vehicle in the planned target section and that is set so as to preferentially pass through the avoidance route set for each obtained obstructive factor, and execute the autonomous driving assistance of the vehicle based on the lane change route.

Abstract: A control device of robot includes: image data acquirer configured to acquire image data taken by camera, image data including a teaching substrate and a substrate placing portion of a hand, the teaching substrate arranged as a teaching target at substrate target position; a virtual substrate information generator configured to generate information of a virtual substrate virtually arranged at the substrate placing portion of the hand in image data of the camera; distance information calculator configured to calculate distance information from substrate placing portion to the teaching substrate based on image data of the camera; operation control unit configured to control operation of robot arm based on distance information from the substrate placing portion to the teaching substrate such that the virtual substrate coincides with the teaching substrate; and storage unit configured to store, as teaching data, position of the hand when the virtual substrate coincides with the teaching substrate.

Abstract: A substrate conveyance robot is provided with a robot arm capable of elevating; a substrate holding device mounted to the robot arm; and a substrate detection unit for detecting a substrate held by the substrate holding device. The substrate detection unit has a substrate sensor for detecting the substrate and a sensor elevating unit for scanning a region including a position where the substrate is arranged by elevating the substrate sensor without elevating the robot arm. Thus, the substrate in a device provided with an opening having a small dimension can be detected without hindrance while preventing collision of the robot and the device.

Abstract: A control device is configured to make a robot arm and a substrate holding device execute a blade member advancing operation for advancing a pair of blade members into a substrate placing structure, a substrate receiving operation for receiving a substrate placed on an upper stage of the substrate placing structure by the blade member in a substrate non-holding state, and a substrate placing operation for placing the substrate on the blade member in a substrate holding state onto a lower stage. A timing of receiving a substrate by the substrate receiving operation is shifted from a timing of placing a substrate by the substrate placing operation. A substrate conveying robot capable of shortening the tact time upon conveying substrates regardless of the kind of substrate fixing method in the substrate holding device can be provided.

Abstract: Autonomous driving assistance systems, methods, and programs obtain road information that specifies classification of lanes located ahead in a direction in which a vehicle is traveling and road connection for each lane. The systems, methods, and programs specify, based on the road information, a planned route that is to be taken by the vehicle on a presumption that the vehicle travels without changing lanes, when the vehicle travels with autonomous driving assistance, and execute the autonomous driving assistance for the vehicle according to the specified planned route.

Abstract: A controller: selects one optical sensor to use from among a first optical sensor and at least one second optical sensor; moves a substrate transfer hand to a detection start position at which an optical path of the selected optical sensor is positioned above a substrate placing portion and does not interfere with a pillar portion; lowers the substrate transfer hand from the detection start position to a detection position at which an object is detected by the optical sensor; and stores, as a height position of the substrate placing portion, a height of the optical path of the optical sensor from a predetermined positional reference when the substrate transfer hand is at the detection position.

Abstract: A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

Abstract: A controller: selects one optical sensor to use from among a first optical sensor and at least one second optical sensor; moves a substrate transfer hand to a detection start position at which an optical path of the selected optical sensor is positioned above a substrate placing portion and does not interfere with a pillar portion; lowers the substrate transfer hand from the detection start position to a detection position at which an object is detected by the optical sensor; and stores, as a height position of the substrate placing portion, a height of the optical path of the optical sensor from a predetermined positional reference when the substrate transfer hand is at the detection position.

Abstract: Autonomous driving assistance systems, methods, and programs obtain road information that specifies line types of lane markings and connection types of lanes and specify, when a vehicle travels with autonomous driving assistance, a planned route to be taken by the vehicle based on the road information. The systems, methods, and programs execute the autonomous driving assistance for the vehicle according to the specified planned route.

Abstract: A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.

Abstract: Self-driving assistance devices and programs detect a location of a vehicle and identify a planned travel route on which the vehicle travels from now on, based on the detected location of the vehicle. The devices and programs provide self-driving assistance of the vehicle according to the identified planned travel route. When a plurality of candidates for the location of the vehicle are detected after the vehicle passes through a divergence point, the devices and programs provide self-driving assistance of the vehicle according to a determined planned travel route, which is identified by the processor before the vehicle passes through the divergence point.

Abstract: A seal belt includes inner and outer belt sections. The inner belt section revolves according to the movable member movement. The outer belt section includes, between the inner belt section and an opening, a first portion in which a first end is retained at a movable member inside section portion, the portion being closer to the opening lower end, and the remaining portion extends along the opening and is retained at a third space position, and a second portion in which a first end is retained at an inside section portion, the portion being closer to the lower end, and the remaining portion extends to a fourth space position along the opening and is retained at the fourth space position. The first portion and second portions lengths are changed in a complementary manner according to the movable member movement. The drive mechanism is surrounded by the inner belt section.

Abstract: Autonomous driving assistance systems, methods, and programs obtain road information that specifies classification of lanes located ahead in a direction in which a vehicle is traveling and road connection for each lane. The systems, methods, and programs specify, based on the road information, a planned route that is to be taken by the vehicle on a presumption that the vehicle travels without changing lanes, when the vehicle travels with autonomous driving assistance, and execute the autonomous driving assistance for the vehicle according to the specified planned route.

Abstract: Autonomous driving assistance systems, methods, and programs obtain road information that specifies line types of lane markings and connection types of lanes and specify, when a vehicle travels with autonomous driving assistance, a planned route to be taken by the vehicle based on the road information. The systems, methods, and programs execute the autonomous driving assistance for the vehicle according to the specified planned route.

Abstract: A horizontal articulated robot includes: a first link; a second link whose proximal end portion is coupled to one of an upper side and a lower side of a distal end portion of the first link; a third link whose proximal end portion is coupled to the other upper or lower side of a distal end portion of the second link; and a spacer disposed at a coupling position where the second link and one of the first link and the third link are coupled together, the spacer spacing the second link and the one link apart from each other in an up-down direction, such that a motion trajectory of the third link does not interfere with the first link.