Abstract: There is provided a technology for imparting attenuation while maintaining rigidity of a support member that reduces vibration of a sample stage when disturbance such as an environmental sound is applied to a device and vibrates the sample stage. A charged particle beam device according to the present disclosure includes a sample stage that can move a sample, an attenuation unit that attenuates vibration of the sample stage, and a sample chamber that stores the sample stage and the attenuation unit. In the charged particle beam device, the sample stage and the attenuation unit are disposed so as to be horizontal to each other. Also, the sample stage is configured to be supported so as to be sandwiched between the attenuation unit and a first side surface of a casing, and the inside of the casing of the attenuation unit is filled with a plural number of friction bodies.

Abstract: Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and increase in weight of the support body is suppressed. The support body includes: a first member which supports a mounted object, and is supported by a vibration removing mount; second members which have a thickness different from that of the first member and arranged to overlap the first member; fixing members which fix the first member and the second members; and damping members which have rigidity lower than the fixing members and are deformed by a difference in variations between the first member and the second members.

Abstract: Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and increase in weight of the support body is suppressed. The support body includes: a first member which supports a mounted object, and is supported by a vibration removing mount; second members which have a thickness different from that of the first member and arranged to overlap the first member; fixing members which fix the first member and the second members; and damping members which have rigidity lower than the fixing members and are deformed by a difference in variations between the first member and the second members.

Abstract: A charged particle device includes a cylindrical column (102), a charged particle beam optical system disposed in the column; a sample stage (103) disposed on the column, and a support device (211, 212) supporting the column. The support device includes a simply supported structure that simply supports the column at a plurality of support points set along an axial line direction of the column. The support points for the column are disposed at positions corresponding to the positions of nodes of vibration of the column. In this way, the rigidity of the column can be increased without increasing the weight of the column itself, whereby vibrations acting on the column can be decreased.

Abstract: A charged particle device includes a cylindrical column (102), a charged particle beam optical system disposed in the column; a sample stage (103) disposed on the column, and a support device (211, 212) supporting the column. The support device includes a simply supported structure that simply supports the column at a plurality of support points set along an axial line direction of the column. The support points for the column are disposed at positions corresponding to the positions of nodes of vibration of the column. In this way, the rigidity of the column can be increased without increasing the weight of the column itself, whereby vibrations acting on the column can be decreased.

Abstract: A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range of the specimen stage is achieved. The charged particle device (1) has a long cylindrical column (2) at its upper portion and a hollow specimen chamber (3) arranged under the column (2). The specimen chamber (3) is divided into a specimen chamber upper portion (3a) and a specimen chamber bottom portion (3b). A vertical vibration of the specimen chamber upper portion (3a) is larger than a horizontal vibration of the specimen chamber upper portion (3a). A horizontal vibration of the specimen chamber bottom portion (3b) is large. The column (2) has a charged particle gun and a detector. The column (1) and a specimen stage supporter (4) are held by the specimen chamber upper portion (3a), while the specimen stage supporter (4) holds the specimen stage (5).

Abstract: It includes: a part which changes a computer-aided design model according to a design variable and outputs it; a part which calculates and outputs natural vibration modes and natural frequencies; a part which makes a natural vibration mode image; a part which binarizes a natural vibration mode image by a threshold value to make a binary image; a part which extracts pattern information from a binary image and outputs it together with the image; a part for distinguishing natural vibration mode which, using pattern information, distinguishes the natural vibration mode to be tracked from natural vibration modes after deformation and outputs it; and a part for calculating optimum solution which finds a design variable which makes the natural frequency of a natural vibration mode a target value and outputs it. Thereby, the structural optimization system can easily distinguish and track natural vibration modes through computer-aided design model change in structural design.

Abstract: It includes: a part which changes a computer-aided design model according to a design variable and outputs it; a part which calculates and outputs natural vibration modes and natural frequencies; a part which makes a natural vibration mode image; a part which binarizes a natural vibration mode image by a threshold value to make a binary image; a part which extracts pattern information from a binary image and outputs it together with the image; a part for distinguishing natural vibration mode which, using pattern information, distinguishes the natural vibration mode to be tracked from natural vibration modes after deformation and outputs it; and a part for calculating optimum solution which finds a design variable which makes the natural frequency of a natural vibration mode a target value and outputs it. Thereby, the structural optimization system can easily distinguish and track natural vibration modes through computer-aided design model change in structural design.