Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate. Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate. Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: A pattern transfer system includes a stage device. The system includes a fine-motion driving device for moving a movable stage through a first range, a relatively rough-motion driving device for moving the movable stage through a second range, which has substantially the same extent as the first range, and a transfer device for transferring a pattern onto a substrate placed on the movable stage.

Abstract: A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.

Abstract: A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

Abstract: An accelerometer is composed of a pair of housings each of which forms a magnetic structure together with a permanent magnet and a flapper flexurally supported by hinge portions between the magnetic structures. The permanent magnet is secured to the housing of the magnetic structure by means of a spacer so as to prevent a harmful thermal stress which will be caused by the difference of thermal expansion between the magnet and the housing. A bobbin with a torquer coil is secured to the flapper by means of a base member to take no effect of thermal stress which will be caused by the difference between the materials of the bobbin and the flapper. The above elements are housed in a case which is installed in an instrument board so as to be unaffected by changes in temperature in surroundings of the accelerometer.