Patents by Inventor Hirohito TANINO

Hirohito TANINO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing device
    Patent number: 11551949
    Abstract: According to one embodiment, a substrate processing device includes a stage configured to mount a substrate, a mold having a first surface facing an upper surface of an outer peripheral edge of the substrate and a second surface facing a side surface of an outer peripheral continuous with the upper surface of the outer peripheral edge, a mold moving mechanism configured to move the mold to bring the first surface close to the upper surface of the outer peripheral edge of the substrate and the second surface close to the side surface of the outer peripheral of the substrate, and a nozzle arranged in the mold, wherein the nozzle ejects resist.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: January 10, 2023
    Assignee: Kioxia Corporation
    Inventor: Hirohito Tanino
  • SUBSTRATE PROCESSING DEVICE
    Publication number: 20210074555
    Abstract: According to one embodiment, a substrate processing device includes a stage configured to mount a substrate, a mold having a first surface facing an upper surface of an outer peripheral edge of the substrate and a second surface facing a side surface of an outer peripheral continuous with the upper surface of the outer peripheral edge, a mold moving mechanism configured to move the mold to bring the first surface close to the upper surface of the outer peripheral edge of the substrate and the second surface close to the side surface of the outer peripheral of the substrate, and a nozzle arranged in the mold, wherein the nozzle ejects resist.
    Type: Application
    Filed: July 23, 2020
    Publication date: March 11, 2021
    Applicant: Kioxia Corporation
    Inventor: Hirohito TANINO