Patents by Inventor Hiroichi Hawahira

Hiroichi Hawahira has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Phase shifting mask and method of manufacturing same
    Patent number: 5260152
    Abstract: A method for manufacture of such a phase shifting mask comprises the steps of forming a light shielding layer on a substrate; forming a photoresist on the light shielding layer; patterning the photoresist to form a resist pattern; providing an opening in the light shielding layer by the use of the resist pattern as a mask, thereby forming a light shielding pattern; etching the substrate anisotropically to form a phase shifting segment; side etching the light shielding pattern to form a light shielding region; and removing the resist pattern.
    Type: Grant
    Filed: April 27, 1992
    Date of Patent: November 9, 1993
    Assignee: Sony Corporation
    Inventors: Hideo Shimizu, Hiroichi Hawahira