Abstract: A cleaning method of cleaning a solution treatment apparatus for applying a coating solution onto a substrate, the solution treatment apparatus including a holder holding and rotating the substrate; a coating solution supplier; and an inner cup surrounding the holder from a lateral side and having a peripheral edge side upper surface inclining down outward in a radial direction. The cleaning method includes introducing the cleaning solution to the storage chamber via the introduction hole, discharging the cleaning solution from the discharge port and making the cleaning solution flow down along the peripheral edge side upper surface of the inner cup, thereby cleaning away the coating solution adhering to the peripheral edge side upper surface. The discharging in the cleaning discharges the cleaning solution from discharge ports of the inner cup outward in the radial direction and obliquely upward.

Abstract: A drum type washing and drying machine has a water tank (4), a rotary drum rotatably provided in the water tank (5), a dehumidifying heat exchanger for dehumidifying air introduced from inside of the rotary drum (5), a heater unit for heating the air dehumidified by the dehumidifying heat exchanger, and a blower (131) for introducing the air in the rotary drum (5) into the dehumidifying heat exchanger and delivering into the rotary drum (5) the air heated by the heater unit. A filter (160) is placed in a suction-side channel between the rotary drum (5) and the blower and on an upstream side of air flow produced by the blower (131) in a drying process. The filter (160) is placed so as to be soaked in water supplied into the water tank in a washing process or in a rinsing process.

Abstract: A drum type washing and drying machine has a water tank (4), a rotary drum rotatably provided in the water tank (5), a dehumidifying heat exchanger for dehumidifying air introduced from inside of the rotary drum (5), a heater unit for heating the air dehumidified by the dehumidifying heat exchanger, and a blower (131) for introducing the air in the rotary drum (5) into the dehumidifying heat exchanger and delivering into the rotary drum (5) the air heated by the heater unit. A filter (160) is placed in a suction-side channel between the rotary drum (5) and the blower and on an upstream side of air flow produced by the blower (131) in a drying process. The filter (160) is placed so as to be soaked in water supplied into the water tank in a washing process or in a rinsing process.