Abstract: A method of evaluating cleanliness of a member having a silicon carbide surface, the method including bringing the silicon carbide surface into contact with a mixed acid of hydrofluoric acid, hydrochloric acid and nitric acid; concentrating the mixed acid brought into contact with the silicon carbide surface by heating; subjecting a sample solution obtained by diluting a concentrated liquid obtained by the concentration to quantitative analysis of metal components by Inductively Coupled Plasma-Mass Spectrometry; and evaluating cleanliness of the member having a silicon carbide surface on the basis of a quantitative result of metal components obtained by the quantitative analysis.

Abstract: According to one embodiment, a wiring fabrication method includes pressing a first template including a first recessed portion and a second recessed portion provided at a bottom of the first recessed portion against a first film to form a first pattern including a first raised portion, corresponding to the first recessed portion, and a second raised portion, corresponding to the second recessed portion. The second raised portion protrudes from the first raised portion once formed. After forming the first pattern, a first wiring, corresponding to the first raised portion, and a via, corresponding to the second raised portion, is formed using the first pattern.

Abstract: An imprint device includes a load port for receiving a substrate to be processed, a sensor that acquires information from the substrate about a film on the substrate, and a primer forming unit configured to receive the substrate from the load port. A controller is configured to select primer process conditions corresponding to the film information. The primer forming unit receives primer process conditions from the controller and forms a primer layer on the substrate over the film. The primer layer is formed according to the selected process conditions. An imprinting unit of the imprint device is configured to receive the substrate from the primer forming unit and perform imprint lithography on the substrate.

Abstract: A stable form which uses a carbon material having electrical conductivity as a raw material and that the electrical conductivity of the carbon material is retained and/or improved, and which improves the electricity generation properties when used in a catalyst layer for a fuel cell. The present invention is directed to, e.g., a calcined material of a mixture of an aromatic compound having a phenolic hydroxyl group and a carbon material having electrical conductivity.

Abstract: An imprinting method includes dispensing a first liquid on a first region of a substrate. The first liquid is a photocurable resist precursor. A second liquid is dispensed on a second region of the substrate. The second region is adjacent to and surrounding the first region. The second liquid is non-photocurable as dispensed. The first region is then irradiated with light while a patterned template is being pressed against the first liquid. The light cures the first liquid and forms a resist pattern corresponding to the patterned template. The patterned template and the substrate are then separated from each other. The second liquid is then selectively removed from the substrate while leaving the resist pattern on the substrate.

Abstract: In an engine system including an engine, and an exhaust gas recirculation device including a communicating pipe that communicates an exhaust pipe of the engine with an intake pipe, and a valve provided in the communicating pipe, and an electronic control unit, and its control method, the electronic control unit estimates the pressure in the intake pipe as an estimated intake pressure, and performs a jamming diagnosis to determine whether foreign matter is stuck in the valve, by comparing an intake pressure difference between a detected intake pressure and the estimated intake pressure with a threshold value, when a diagnosis condition including an opening change condition that the target opening becomes equal to or larger than a first predetermined opening and then becomes equal to or smaller than a second predetermined opening that is smaller than the first predetermined opening is satisfied.

Abstract: The method of etching a boron-doped p-type silicon wafer includes preparing an etching gas by introducing an ozone-containing gas and hydrofluoric acid mist into a chamber and mixing them; and performing gas phase decomposition of a surface layer area of a boron-doped p-type silicon wafer with a resistivity of 0.016 ?cm or less by bringing the etching gas into contact with a surface of the boron-doped p-type silicon wafer; and further includes introducing the ozone-containing gas into the chamber at a flow rate of 3,000 sccm or more; and preparing the hydrofluoric acid mist by atomizing hydrofluoric acid with a hydrofluoric acid concentration of 41 mass % or more.

Abstract: Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.

Abstract: A controller of an embodiment includes a limiter receiving an active current command initial value, limiting a maximum value of the active current command initial value with a predetermined value, and outputting a first value; a circuit to calculate a reactive current command initial value; a calculator to calculate a reactive current command adjustment value; a unit receiving the first value as an input, and calculating a reactive current upper limit value such that a composite value of the first value and the reactive current upper limit value is equal to or smaller than an input current maximum value; and a limiter to output the reactive current command adjustment value or the reactive current upper limit value, whichever is smaller. The predetermined value is a value to set the reactive current upper limit value to a value larger than zero and smaller than the input current maximum value.

Abstract: A hybrid vehicle includes an engine, an exhaust gas recirculation device, a traveling motor, and a control device. The exhaust gas recirculation device includes a communication pipe that allows an exhaust pipe and an intake pipe of the engine to communicate with each other and a valve that is provided in the communication pipe. The control device is configured to perform foreign matter removal control for opening and closing the valve when foreign matter caught in the valve is detected and the hybrid vehicle stops.

Abstract: According to one embodiment, a template for imprint patterning processes comprises a template substrate having a first surface and a pedestal on the first surface of the template substrate, the pedestal having a second surface spaced from the first surface in a first direction perpendicular to the first surface. A pattern is disposed on the second surface. The pedestal has a sidewall between the first surface and the second surface that is at an angle of less than 90° to the second surface.

Abstract: A cooling apparatus for an internal combustion engine includes a pump, a radiator, a flow rate adjustment valve, a bypass passage, and a controller. The flow rate adjustment valve includes a valve member that rotates to change an open degree of the flow rate adjustment valve and a valve member biasing component that biases the valve member in a valve-closing direction in which the open degree decreases. The valve member rotates in a valve-opening direction in which the open degree increases when a pressure difference increases between positions upstream and downstream of the valve member in a flow direction of coolant in the circulation circuit and rotate in the valve-closing direction when the pressure difference decreases. The controller increases the pump discharge amount as a target radiator flow rate that is a target of an amount of coolant passing through the radiator increases.

Abstract: According to one embodiment, a template for imprint patterning processes comprises a template substrate having a first surface and a pedestal on the first surface of the template substrate, the pedestal having a second surface spaced from the first surface in a first direction perpendicular to the first surface. A pattern is disposed on the second surface. The pedestal has a sidewall between the first surface and the second surface that is at an angle of less than 90° to the second surface.

Abstract: A method of evaluating cleanliness of a member having a silicon carbide surface, the method including bringing the silicon carbide surface into contact with a mixed acid of hydrofluoric acid, hydrochloric acid and nitric acid; concentrating the mixed acid brought into contact with the silicon carbide surface by heating; subjecting a sample solution obtained by diluting a concentrated liquid obtained by the concentration to quantitative analysis of metal components by Inductively Coupled Plasma-Mass Spectrometry; and evaluating cleanliness of the member having a silicon carbide surface on the basis of a quantitative result of metal components obtained by the quantitative analysis.

Abstract: A cooling apparatus includes a circulation circuit, a pump, a flow rate adjustment valve, and a controller. The flow rate adjustment valve includes a valve member that rotates to change an open degree of the flow rate adjustment valve and a stopper that moves between a restriction position and a retraction position. The controller is configured to execute, when maintaining the open degree of the flow rate adjustment, a preparatory process of moving the stopper to the restriction position after arranging the stopper at the retraction position and arranging the valve member further in the valve-closing direction than the stopper through control of the pump discharge amount.

Abstract: According to one embodiment, a wiring fabrication method includes pressing a first template including a first recessed portion and a second recessed portion provided at a bottom of the first recessed portion against a first film to form a first pattern including a first raised portion, corresponding to the first recessed portion, and a second raised portion, corresponding to the second recessed portion. The second raised portion protrudes from the first raised portion once formed. After forming the first pattern, a first wiring, corresponding to the first raised portion, and a via, corresponding to the second raised portion, is formed using the first pattern.

Abstract: Provided is a method of evaluating cleanliness of a member having a silicon carbide surface, the method including bringing the silicon carbide surface into contact with a mixed acid of hydrofluoric acid, hydrochloric acid and nitric acid; concentrating the mixed acid brought into contact with the silicon carbide surface by heating; subjecting a sample solution obtained by diluting a concentrated liquid obtained by the concentration to quantitative analysis of metal components by Inductively Coupled Plasma-Mass Spectrometry; and evaluating cleanliness of the member having a silicon carbide surface on the basis of a quantitative result of metal components obtained by the quantitative analysis.

Abstract: A vehicle including: an engine; an exhaust gas recirculation device including a communication pipe by which an exhaust pipe of the engine and an intake pipe of the engine communicating, and a valve that is provided in the communication pipe; and a control device configured to control the engine, to control the valve based on a target opening of the valve, to perform automatic stopping of the engine based on satisfaction of an automatic stopping condition, and to perform automatic starting of the engine based on satisfaction of an automatic starting condition. The control device is configured to prohibit automatic stopping of the engine when it is determined that foreign matter is caught in the valve through catching diagnosis which is diagnosis of whether foreign matter is caught in the valve.

Abstract: An engine unit includes an engine, an exhaust gas recirculation device including a communication pipe by which an exhaust pipe of the engine and an intake pipe of the engine to communicating and a valve that is provided in the communication pipe, and a control device. The control device is configured to perform a foreign matter removal control that is opening and closing the valve when catching of foreign matter in the valve is detected and the engine stops.

Abstract: A hybrid vehicle includes an engine, an exhaust gas recirculation device, a traveling motor, and a control device. The exhaust gas recirculation device includes a communication pipe that allows an exhaust pipe and an intake pipe of the engine to communicate with each other and a valve that is provided in the communication pipe. The control device is configured to perform foreign matter removal control for opening and closing the valve when foreign matter caught in the valve is detected and the hybrid vehicle stops.