Abstract: According to one embodiment, an imprint method for a substrate having a plurality of shot regions includes performing a first process on each target shot region in the plurality of shot regions and performing a second process on a non-target shot region in the plurality of shot regions. The first process includes pressing a template against resin in the target shot region to transfer a pattern to the resin, curing the resin, and releasing the template from the cured resin while supplying inert gas towards the substrate from an outer edge side of the template. The second process includes causing the template to approach the non-target shot region without coming into contact with resin in the non-target shot region, and moving the template away from the resin in the non-target shot region while supplying inert gas towards the substrate from the outer edge side of the template.

Abstract: According to one embodiment, an imprint template includes a substrate having a first surface and a mesa part protruding from the first surface. The mesa part has a second surface with a pattern thereon. The mesa part includes a sloped region. The sloped region is on at least an outer circumferential portion of the second surface. The second surface in the sloped region slopes downward towards the first surface to an outer edge of the mesa part when the substate is in a non-pressurized state.

Abstract: Colloidal silica particles containing a fluorescent dye compound, composed of a silica particle containing a silica component and a fluorescent dye compound chemically bound or adsorbed thereto, wherein the colloidal silica particles containing a fluorescent dye compound have an average diameter of 30 nm or less, and wherein said silica particles are used simultaneously as fluorescent-labelling nanobeads; a fluorescent nano-material comprising said colloidal silica particles; and a biochip and an assay method using the same.

Abstract: A system of quantitatively determining a biomolecule, which has: allowing fluorescent silica particles capable of emitting fluorescence detectable by a flow cytometer to capture a target biomolecule fluorescent-labelled for quantitative determination; detecting the fluorescence emitted from the fluorescent silica particles themselves by using the flow cytometer; and measuring the intensity of the fluorescence of the labelled target biomolecule, thereby quantitatively determining the target biomolecule.

Abstract: A system of quantitatively determining a biomolecule, which has: allowing fluorescent silica particles capable of emitting fluorescence detectable by a flow cytometer to capture a target biomolecule fluorescent-labelled for quantitative determination; detecting the fluorescence emitted from the fluorescent silica particles themselves by using the flow cytometer; and measuring the intensity of the fluorescence of the labelled target biomolecule, thereby quantitatively determining the target biomolecule.

Abstract: Colloidal silica particles containing a fluorescent dye compound, composed of a silica particle containing a silica component and a fluorescent dye compound chemically bound or adsorbed thereto, wherein the colloidal silica particles containing a fluorescent dye compound have an average diameter of 30 nm or less, and wherein said silica particles are used simultaneously as fluorescent-labelling nanobeads; a fluorescent nano-material comprising said colloidal silica particles; and a biochip and an assay method using the same.

Abstract: A multilayer interconnection is prepared by forming a stable insulating film on a nitride film which is formed on a first interconnection metal layer, and then, a second interconnection metal layer is formed on the insulating film. The insulating film can be made of aluminum oxide, an oxynitride or the other metal oxide. A silicon rich layer can be used for this purpose.