Patents by Inventor Hirokazu Mizonobe

Hirokazu Mizonobe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SPIN CHUCK AND APPARATUS HAVING SPIN CHUCK FOR MANUFACTURING PIEZOELECTRIC RESONATOR PIECE
    Publication number: 20120216745
    Abstract: A spin chuck rotating a substrate utilizing a centrifugal force while holding one surface of the substrate with a substrate holding section to apply a film material to another surface of the substrate. The substrate holding section includes a tapered peripheral part having a peripheral edge where a substrate holding surface and a back surface thereof are connected. The other surface of the substrate and the back surface of the substrate holding section smoothly continue with each other with the holding surface of the substrate holding section kept in contact with the other surface of the substrate.
    Type: Application
    Filed: February 14, 2012
    Publication date: August 30, 2012
    Inventor: Hirokazu Mizonobe