Patents by Inventor Hirokazu Niki

Hirokazu Niki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5744281
    Abstract: A resist composition for forming a pattern, which comprises (a) a compound represented by the following formula (1) and satisfying the following inequalities, ##STR1## wherein R.sup.1 is hydrogen atom or methyl group, R.sup.2 is a monovalent organic group, m is 0 or a positive integer, n is a positive integer, and m and n satisfying a condition of 0.03.ltoreq.n/(m+n).ltoreq.1, (b) a compound capable of generating an acid when irradiated with light, and (c) 4-phenylpyridine, wherein a weight-average molecular weight, Mw and a number-average molecular weight, Mn satisfy the following inequality, 4,000.ltoreq.Mw.ltoreq.50,000, 1.10.ltoreq.Mw/Mn.ltoreq.2.50 (Mw and Mn respectively represent value converted in styrene).
    Type: Grant
    Filed: May 1, 1997
    Date of Patent: April 28, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirokazu Niki, Hiromitsu Wakabayashi, Rumiko Hayase, Naohiko Oyasato, Yasunobu Onishi, Kazuo Sato, Kenji Chiba, Takao Hayashi
  • Patent number: 5691101
    Abstract: Disclosed are a safe slurry photosensitive composition superior in image formation capabilities such as resolution and sensitivity and containing no harmful compound, and a safe water-soluble photosensitive composition capable of being dissolved in water without using any organic solvent while maintaining a sufficient sensitivity as a resist and containing no harmful substance. The slurry photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, at least one type of a resin with acid-crosslinkability or acid-decomposability, and a powder. Various devices can be manufactured by forming a layer of this photosensitive composition on a substrate, exposing the layer to light in accordance with a desired pattern, and heating the layer. The water-soluble photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, and an acetal resin.
    Type: Grant
    Filed: May 9, 1996
    Date of Patent: November 25, 1997
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toru Ushirogouchi, Naomi Shida, Takuya Naito, Koji Asakawa, Akinori Hongu, Makoto Nakase, Hirokazu Niki
  • Patent number: 5658706
    Abstract: A resist composition for forming a pattern, which comprises (a) a compound represented by the following formula (1) and satisfying the following inequalities, ##STR1## wherein R.sup.1 is hydrogen atom or methyl group, R.sup.2 is a monovalent organic group, m is 0 or a positive integer, n is a positive integer, and m and n satisfying a condition of 0.03.ltoreq.n/(m+n).ltoreq.1, (b) a compound capable of generating an acid when irradiated with light, and (c) a nitrogen-containing compound, wherein a weight-average molecular weight, Mw and a number-average molecular weight, Mn satisfy the following inequality, 4,000.ltoreq.Mw.ltoreq.50,000, 1.10.ltoreq.Mw/Mn.ltoreq.2.50 (Mw and Mn respectively represent value converted in styrene).
    Type: Grant
    Filed: September 8, 1994
    Date of Patent: August 19, 1997
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirokazu Niki, Hiromitsu Wakabayashi, Rumiko Hayase, Naohiko Oyasato, Yasunobu Onishi, Kazuo Sato, Kenji Chiba, Takao Hayashi
  • Patent number: 5580702
    Abstract: Disclosed herein is a resist for forming patterns, which is greatly sensitive to ultraviolet rays an ionizing radiation, and which can therefore form a high-resolution resist pattern if exposed to ultra violet rays or an unionizing radiation. Hence, the resist is useful in a method of manufacturing semicon ductor devices having high integration densities. The resist comprises tert-butoxycarbonyl methoxypolyhydroxy styrene and an o-quinonediazide compound.
    Type: Grant
    Filed: December 13, 1994
    Date of Patent: December 3, 1996
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Rumiko Hayase, Yasunobu Onishi, Hirokazu Niki, Noahiko Oyasato, Yoshihito Kobayashi, Shuzi Nayase
  • Patent number: 5432023
    Abstract: In a fuel cell comprising a stack having superposed a plurality of electromotive parts composed of a fuel electrode, an oxidizing electrode, and an electrolyte layer nipped by the two electrodes and using a liquid fuel as the fuel for the fuel cell, this invention contemplates forming a liquid fuel introducing path destined to be directly exposed to the liquid fuel on terminal surfaces of the component parts of the electromotive parts in a direction perpendicular to the flow of an oxidizing gas along at least one of the outer peripheral surfaces of the stack including the terminal surface of the fuel electrode and lying parallelly to the flow of the oxidizing gas and enabling the liquid fuel in the liquid fuel introducing path to be supplied to the fuel electrodes by a capillary attraction.
    Type: Grant
    Filed: May 5, 1994
    Date of Patent: July 11, 1995
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shuji Yamada, Motoya Kanda, Masao Yamamoto, Nobukazu Suzuki, Yoshiko Kanazawa, Akinori Hongu, Yuu Kondou, Ken Uchida, Koji Hashimoto, Hirokazu Niki, Kunihiko Sasaki, Shinji Tsuruta
  • Patent number: 5403695
    Abstract: Disclosed herein is a resist for forming patterns, which is greatly sensitive to ultraviolet rays an ionizing radiation, and which can therefore form a high-resolution resist pattern if exposed to ultra violet rays or an unionizing radiation. Hence, the resist is useful in a method of manufacturing semicon ductor devices having high integration densities. The resist comprises tert-butoxycarbonyl methoxypolyhydroxy styrene and an o-quinonediazide compound.
    Type: Grant
    Filed: April 30, 1992
    Date of Patent: April 4, 1995
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Rumiko Hayase, Yasunobu Onishi, Hirokazu Niki, Naohiko Oyasato, Yoshihito Kobayashi, Shuzi Hayase
  • Patent number: 5372914
    Abstract: On a substrate a protective layer is formed which can suppress the diffusion of a contaminant from the substrate. On the protective layer, thus formed, a resin layer is formed. The resin layer comprises a photosensitive composition containing a compound which has a substituent group capable of being decomposed or cross-linked in the presence of an acid, and a compound which can generate an acid when exposed to light. The resin layer is pattern-exposed to light and then baked at a predetermined temperature. The resin layer is developed, whereby the exposed portions of the resin layer are removed or left, thus forming a pattern comprising lines and spaces each having a predetermined width. Each of the lines of the pattern has a cross-section having neither sloped profile nor undercut profile, and the pattern therefore has an improved resolution.
    Type: Grant
    Filed: March 24, 1993
    Date of Patent: December 13, 1994
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takuya Naito, Osamu Sasaki, Tsukasa Tada, Naoko Kihara, Toru Ushirogouchi, Satoshi Saito, Takashi Jonai, Hirokazu Niki
  • Patent number: 5364711
    Abstract: In a fuel cell comprising a stack having superposed a plurality of electromotive parts composed of a fuel electrode, an oxidizing electrode, and an electrolyte layer nipped by the two electrodes and using a liquid fuel as the fuel for the fuel cell, this invention contemplates forming a liquid fuel introducing path destined to be directly exposed to the liquid fuel on terminal surfaces of the component parts of the electromotive parts in a direction perpendicular to the flow of an oxidizing gas along at least one of the outer peripheral surfaces of the stack including the terminal surface of the fuel electrode and lying parallelly to the flow of the oxidizing gas and enabling the liquid fuel in the liquid fuel introducing path to be supplied to the fuel electrodes by a capillary attraction.
    Type: Grant
    Filed: March 31, 1993
    Date of Patent: November 15, 1994
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shuji Yamada, Motoya Kanda, Masao Yamamoto, Nobukazu Suzuki, Yoshiko Kanazawa, Akinori Hongu, Yuu Kondou, Ken Uchida, Koji Hasimoto, Hirokazu Niki, Kunihiko Sasaki, Shinji Tsuruta
  • Patent number: 5326675
    Abstract: A radiation-sensitive layer comprising as a main component a radiation-sensitive composition containing a compound capable of generating an acid when exposed to a chemical radiation and a compound having at least one linkage decomposable by an acid is formed on a substrate. An acidic coating layer is formed on the radiation-sensitive layer. The radiation-sensitive layer and the acidic coating layer are pattern-exposed to a chemical radiation. The radiation-sensitive layer and the acidic coating layer are baked and developed by using an aqueous alkaline solution to obtain a pattern comprising lines and spaces, each having a predetermined width. A fine pattern of a rectangular sectional shape can be formed without producing eaves caused by a surface inhibition layer layer, which is produced on the film surface.
    Type: Grant
    Filed: December 9, 1992
    Date of Patent: July 5, 1994
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirokazu Niki, Rumiko Hayase, Naohiko Oyasato, Yasunobu Onishi, Akitoshi Kumagae, Kazuo Sato, Masataka Miyamura, Yoshihito Kobayashi
  • Patent number: 5279921
    Abstract: Disclosed is a pattern formation resist which can be exposed with deep UV, has a high dry etching resistance, has a large allowance in a development manipulation using an aqueous alkali solution, and can form a fine pattern having a good sectional shape. The resist comprises an alkali-soluble polymer and a compound represented by the following formula (I) and simultaneously containing, in a single molecule, a substituent which decomposes with an acid and a group which produces an acid with deep UV: ##STR1## wherein the substituent which decomposes with an acid is present in at least one of R.sub.1 to R.sub.4, and when R.sub.1 to R.sub.4 have a group except for the substituent which decomposes with an acid, R.sub.1 represents a nonsubstituted or substituted aliphatic hydrocarbon group, each of R.sub.2 and R.sub.3 independently represents a hydrogen atom or a non-substituted or substituted aliphatic hydrocarbon group, and R.sub.4 represents a nonsubstituted or substituted aliphatic hydrocarbon group.
    Type: Grant
    Filed: November 27, 1991
    Date of Patent: January 18, 1994
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yasunobu Onishi, Yoshihito Kobayashi, Hirokazu Niki
  • Patent number: 5188924
    Abstract: A pattern forming method, comprising the steps of providing a resist film on a substrate; providing a photosensitive film containing a photosensitive diazonium salt on the resist film; and then subjecting the resultant composite to pattern exposure by use of a light to which both of the resist film and the photosensitive diazonium salt are sensitive, can employ a composition for pattern formation which comprises a photosensitive diazonium salt, a resin binder and a solvent. By this method, a minute pattern of 1 .mu.m or less can be formed, utilizing effectively the UV-ray exposure technique of the prior art, with good dimensional precision and stability.
    Type: Grant
    Filed: October 16, 1991
    Date of Patent: February 23, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kunihiro Ikari, deceased, Hirokazu Niki, Makoto Nakase, Toshiaki Shinozaki
  • Patent number: 5100768
    Abstract: A photosensitive composition contains an alkali-soluble polymer having a phenol skeleton in its structure and a heterocyclic compound represented by formula (I-1) or (I-2), formula (II-1) or (II-2), any of formulas (III-1) to (III-8), any of formulas (IV-1) to (IV-12), or any of formulas (V-1) to (V-4) described in the claims and specification. A photosensitive composition containing a heterocyclic compound represented by formula (I-1) or (I-2), any of formulas (III-1) to (III-8), any of formulas (IV-1) to (IV-12), or any of formulas (V-1) to (V-4) can be suitably used as a negative resist. A photosensitive composition containing a heterocyclic compound represented by formula (II-1) or (II-2) can be suitably used as a positive resist. A photosensitive composition containing an alkali-soluble polymer having a phenol skeleton in its structure and a polymer having a nitrogen-containing heterocyclic compound as a polymeric unit is also included in this invention.
    Type: Grant
    Filed: May 4, 1990
    Date of Patent: March 31, 1992
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirokazu Niki, Yasunobu Onishi, Yoshihito Kobayashi, Rumiko Hayase
  • Patent number: 5091282
    Abstract: This invention includes a photosensitive composition containing an alkali-soluble resin and a compound represented by formula (I), (II) or (III) described in the claims and the specification, a photosensitive composition containing an alkali-soluble polymer, a compound represented by formula (IV) described in the claims and the specification and a basic compound, and a photosensitive composition containing an alkali-soluble polymer, a compound represented by formula (VI) described in the claims and the specification and a compound which produces an acid upon radiation of light.
    Type: Grant
    Filed: April 3, 1990
    Date of Patent: February 25, 1992
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yasunobu Onishi, Hirokazu Niki, Yoshihito Kobayashi, Rumiko Hayase, Toru Ushirogouchi
  • Patent number: 4037033
    Abstract: An improved rechargeable nickel-zinc battery is described which is capable of undergoing many charge-discharge cycles (cycle life), with deep discharge, and of high performance with heavy drain discharge during use. The increased cycle life is accomplished by a suitable combination of electrochemical generating elements. The high performance with heavy drain discharge service is obtained by an improved zinc electrode construction. The battery of this invention has a sheet-like kneaded zinc electrode, a sheet-like nickel oxide electrode with limited capacity ratio thereof, a separator, an electrolyte absorber, and a concentrated alkaline electrolyte in limited amounts.
    Type: Grant
    Filed: January 20, 1976
    Date of Patent: July 19, 1977
    Assignee: Tokyo Shibaura Electric Co. Ltd.
    Inventors: Tsutomu Takamura, Tamotsu Shirogami, Hirokazu Niki, Kazuo Aizawa
  • Patent number: 3951687
    Abstract: Provided is a nickel-zinc storage battery prepared, preferably, by winding into a whirlpool a sheet-like zinc electrode, a sheet-like nickel electrode and a separator with the separator interposed between the zinc and nickel electrodes, said zinc electrode being obtained by bonding under pressure to a collector a mixture sheet consisting of zinc oxide, zinc, bismuth oxide, calcium hydroxide and fluoroplastic, said nickel electrode being obtained by bonding under pressure an oxide of nickel to a collector together with a conductive material, said separator being obtained by coating on an alkali-resisting nonwoven fabric a mixture of polyvinyl alcohol and at least either of one selected from the group consisting of boric acids and metal oxides having low solubility to alkali solution and drying the nonwoven fabric thus coated.
    Type: Grant
    Filed: November 20, 1974
    Date of Patent: April 20, 1976
    Assignee: Tokyo Shibaura Electric Co., Ltd.
    Inventors: Tsutomu Takamura, Tamotsu Shirogami, Yuichi Sato, Kenji Murata, Hirokazu Niki
  • Patent number: RE38256
    Abstract: Disclosed are a safe slurry photosensitive composition superior in image formation capabilities such as resolution and sensitivity and containing no harmful compound, and a safe water-soluble photosensitive composition capable of being dissolved in water without using any organic solvent while maintaining a sufficient sensitivity as a resist and containing no harmful substance. The slurry photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, at least one type of a resin with acid-crosslinkability or acid-decomposability, and a powder. Various devices can be manufactured by forming a layer of this photosensitive composition on a substrate, exposing the layer to light in accordance with a desired pattern, and heating the layer. The water-soluble photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, and an acetal resin.
    Type: Grant
    Filed: November 24, 1999
    Date of Patent: September 23, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toru Ushirogouchi, Naomi Shida, Takuya Naito, Koji Asakawa, Akinori Hongu, Makoto Nakase, Hirokazu Niki
  • Patent number: RE35821
    Abstract: A radiation-sensitive layer comprising as a main component a radiation-sensitive composition containing a compound capable of generating an acid when exposed to a chemical radiation and a compound having at least one linkage decomposable by an acid is formed on a substrate. An acidic coating layer is formed on the radiation-sensitive layer. The radiation-sensitive layer and the acidic coating layer are pattern-exposed to a chemical radiation. The radiation-sensitive layer and the acidic coating layer are baked and developed by using an aqueous alkaline solution to obtain a pattern comprising lines and spaces, each having a predetermined width. A fine pattern of a rectangular sectional shape can be formed without producing eaves caused by a surface inhibition layer layer, which is produced on the film surface.
    Type: Grant
    Filed: April 29, 1996
    Date of Patent: June 9, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hirokazu Niki, Rumiko Hayase, Naohiko Oyasato, Yasunobu Onishi, Akitoshi Kumagae, Kazuo Sato, Masataka Miyamura, Yoshihito Kobayashi