Abstract: There is provided a processing apparatus for forming a film with a plasma. The processing apparatus comprises: a processing container, having a ceramic sprayed coating on an inner wall on which an antenna that radiates microwaves is arranged, configured to accommodate a substrate; a mounting table configured to mount the substrate in the processing container; and a controller configured to perform a precoating process of coating a surface of the ceramic sprayed coating with a first carbon film with a plasma of a first carbon-containing gas at a first pressure and a film forming process of forming a second carbon film on the substrate with a plasma of a second carbon-containing gas at a second pressure.

Abstract: The present invention is to enable an adsorbent disposed in the vicinity of a tank port to be appropriately subjected to a purge when the adsorbent in a canister is subjected to the purge by air, thereby eliminating a non-desorption region of fuel vapor. In a fuel tank according to the present invention, a tank port (20t) that communicates with a space in a fuel tank body (10m), a purge port (20p), and an atmosphere port (20a) are formed in a container (21) of a canister (20) constituted by a container body (22) and a cover material (23), an inside of the container (21) of the canister (20) is configured to be partitioned to form passages (T1) and (T2) so that insides of the passages (T1) and (T2) are filled with an adsorbent (C), and the atmosphere port (20a) is provided on one end side in an air flow direction of the passages (T1) and (T2) and the tank port (20t) is provided on the other end side in the air flow direction of the passages (T1) and (T2) together with the purge port (20p).

Abstract: The present invention is to enable an adsorbent disposed in the vicinity of a tank port to be appropriately subjected to a purge when the adsorbent in a canister is subjected to the purge by air, thereby eliminating a non-desorption region of fuel vapor. In a fuel tank according to the present invention, a tank port (20t) that communicates with a space in a fuel tank body (10m), a purge port (20p), and an atmosphere port (20a) are formed in a container (21) of a canister (20) constituted by a container body (22) and a cover material (23), an inside of the container (21) of the canister (20) is configured to be partitioned to form passages (T1) and (T2) so that insides of the passages (T1) and (T2) are filled with an adsorbent (C), and the atmosphere port (20a) is provided on one end side in an air flow direction of the passages (T1) and (T2) and the tank port (20t) is provided on the other end side in the air flow direction of the passages (T1) and (T2) together with the purge port (20p).

Abstract: The present invention has an object to provide a filter device in which a filter is directly fixed to a container, thus eliminating the use of a filter frame. A fuel filter 6 of a fuel supply system 60 includes a filter element 22 for filtering fuel and a filter case 21 made of resin which houses the filter element 22. Ends 22b and 22c of the filter element 22 are directly fixed to an inner wall surface of the filter case 21 by welding. Further, the filter case 21 is formed, on the inner wall surface, with a groove 34 at each end of a weld part 36 in a longitudinal (vertical) direction. The groove 34 serves to receive a melted resin squeezed out from the weld part 36. To isolate the weld part 36 from a (filtering) body 22a of the filter element 22, protrusive ribs 32 and 33 are provided on the inner wall surface of the filter case 21.