Patents by Inventor Hiroki CHAEN

Hiroki CHAEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV transmissive film
    Patent number: 12663706
    Abstract: There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 ?m and a protective layer that covers at least one side of the main layer and has an IR transmittance of 70% or more at a wavelength of 2 ?m.
    Type: Grant
    Filed: May 2, 2023
    Date of Patent: June 23, 2026
    Assignee: NGK INSULATORS, LTD.
    Inventors: Toshikatsu Kashiwaya, Atsuo Kondo, Hiroki Chaen, Takashi Tanimura, Naoki Goriki
  • EUV transmissive membrane
    Patent number: 12591172
    Abstract: Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.
    Type: Grant
    Filed: February 24, 2023
    Date of Patent: March 31, 2026
    Assignee: NGK INSULATORS, LTD.
    Inventors: Toshikatsu Kashiwaya, Atsuo Kondo, Hiroki Chaen, Takashi Tanimura
  • EUV TRANSMISSIVE MEMBRANE, METHOD OF USE THEREOF, AND EXPOSURE METHOD
    Publication number: 20240094620
    Abstract: Provided is an EUV transmissive membrane including a main layer having an EUV transmittance of 85% or more at a wavelength of 13.5 nm, wherein the main layer is composed of a monolayer or a composite layer of two or more layers, and a protective layer that covers at least one side of the main layer, wherein the protective layer includes at least one selected from the group consisting of amorphous carbon, Cu, Al, and an organic resist as a main component.
    Type: Application
    Filed: October 10, 2023
    Publication date: March 21, 2024
    Applicant: NGK INSULATORS, LTD.
    Inventors: Naoki GORIKI, Takashi TANIMURA, Toshikatsu KASHIWAYA, Hiroki CHAEN
  • EUV TRANSMISSIVE FILM
    Publication number: 20230305192
    Abstract: There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 µm and a protective layer that covers at least one side of the main layer and has an IR transmittance of 70% or more at a wavelength of 2 µm.
    Type: Application
    Filed: May 2, 2023
    Publication date: September 28, 2023
    Applicant: NGK INSULATORS, LTD.
    Inventors: Toshikatsu KASHIWAYA, Atsuo KONDO, Hiroki CHAEN, Takashi TANIMURA, Naoki GORIKI
  • EUV TRANSMISSIVE MEMBRANE
    Publication number: 20230213848
    Abstract: Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.
    Type: Application
    Filed: February 24, 2023
    Publication date: July 6, 2023
    Applicant: NGK INSULATORS, LTD.
    Inventors: Toshikatsu KASHIWAYA, Atsuo KONDO, Hiroki CHAEN, Takashi TANIMURA