Abstract: Provided are: a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities; a substance manufacturing equipment and method that can improve the production yield rate. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a classification processing unit (81) configured to select one of a plurality of calculation models (M1, M2, . . . , Mn) for calculating a mechanical property of the substance, based on at least two of the plurality of physical quantities measured; and a mechanical property calculating unit (82) configured to calculate the mechanical property of the substance using the calculation model selected by the classification processing unit (81) and the at least two of the plurality of physical quantities.

Abstract: Provided are: a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities; a substance manufacturing equipment and method that can improve the production yield rate and high-quality substance. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a mechanical property calculating unit (82) configured to calculate, using a plurality of calculation models each for calculating a mechanical property of the substance and at least two of the plurality of physical quantities measured, the mechanical property of the substance for each of the plurality of calculation models; and a selection processing unit (81) configured to select one mechanical property based on the at least two of the plurality of physical quantities.

Abstract: Provided are a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities, etc. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a calculation model generating unit (81) configured to select a plurality of pieces of learning data and generate a calculation model for calculating a mechanical property of the substance; and a mechanical property calculating unit (82) configured to calculate the mechanical property of the substance using the calculation model generated and at least two of the plurality of physical quantities, wherein the selection physical quantities include at least one physical quantity measured using a first measurement signal and at least one physical quantity measured using a second measurement signal.