Patents by Inventor Hiroki KANNAMI

Hiroki KANNAMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged Particle Beam Device and Scan Waveform Generation Method
    Publication number: 20230260739
    Abstract: It is aimed to properly correct the various types of distortion without a reduction in observation throughput.
    Type: Application
    Filed: July 13, 2020
    Publication date: August 17, 2023
    Inventors: Keisuke TANUMA, Masato KAMIO, Hironori ITABASHI, Hiroki KANNAMI, Yusuke SEKI, Takumi UEZONO, Mitsuhiro NAKAMURA
  • Charged particle beam device
    Patent number: 11424099
    Abstract: In order to control a charge amount on a sample surface to a desired value before calculating a frame integration image, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a deflector configured to scan an observation region of the sample with the charged particle beam; a detector configured to detect a charged particle emitted from the sample due to scanning with the charged particle beam; an image generation unit configured to generate a frame image of the observation region based on an observation signal output from the detector; and a scanning suspension time setting unit configured to set a scanning suspension time, which is a time during which scanning of the observation region with the charged particle beam is suspended after a frame image is generated, in which the image generation unit calculates a frame integration image by integrating frame images generated with the scanning suspension time i
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: August 23, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Hiroki Kannami, Hironori Itabashi, Ichiro Fujimura
  • Charged Particle Beam Device
    Publication number: 20210175047
    Abstract: In order to control a charge amount on a sample surface to a desired value before calculating a frame integration image, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a deflector configured to scan an observation region of the sample with the charged particle beam; a detector configured to detect a charged particle emitted from the sample due to scanning with the charged particle beam; an image generation unit configured to generate a frame image of the observation region based on an observation signal output from the detector; and a scanning suspension time setting unit configured to set a scanning suspension time, which is a time during which scanning of the observation region with the charged particle beam is suspended after a frame image is generated, in which the image generation unit calculates a frame integration image by integrating frame images generated with the scanning suspension time i
    Type: Application
    Filed: December 21, 2017
    Publication date: June 10, 2021
    Inventors: Hiroki KANNAMI, Hironori ITABASHI, Ichiro FUJIMURA