Patents by Inventor Hiroki OKAGUCHI

Hiroki OKAGUCHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
    Publication number: 20210020464
    Abstract: A substrate processing apparatus includes a discharge part including a nozzle configured to discharge a processing liquid onto a substrate; a liquid feeder configured to feed the processing liquid to the discharge part; a replenishment part configured to replenish the liquid feeder with the processing liquid to be fed to the discharge part; a connector including a switching valve configured to open/close a flow path between the replenishment part and the liquid feeder; a filter configured to remove foreign matters contained in the processing liquid; a replenishment preparation part configured to open the switching valve after reducing a pressure difference between the inside of the replenishment part and the liquid feeder; and a replenishment controller configured to start replenishment of the processing liquid from the replenishment part to the liquid feeder in a state in which the switching valve is opened by the replenishment preparation part.
    Type: Application
    Filed: July 16, 2020
    Publication date: January 21, 2021
    Inventors: Masayuki KAJIWARA, Katsunori ICHINO, Daisuke ISHIMARU, Takuya TAJIRI, Atsushi YAMAMOTO, Masato IMAMURA, Tomohiko MUTA, Tetsuro IRIYAMA, Takeaki SAKAMOTO, Hiroki OKAGUCHI, Kenji ADACHI