Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: A semiconductor device with improved reliability is provided. The semiconductor device is characterized by its embodiments in that sloped portions are formed on connection parts between a pad and a lead-out wiring portion, respectively. This feature suppresses crack formation in a coating area where a part of the pad is covered with a surface protective film.

Abstract: To provide a technology capable of preventing corrosion of a Cu wiring and thereby improving a production yield of a semiconductor device, a manufacturing method of a semiconductor device includes the steps of: removing a portion of a Cu film other than that in a wiring trench in a semiconductor substrate by CMP using a polishing slurry, removing a portion of a barrier metal film other than that in the, wiring trench by CMP using a polishing slurry containing an anticorrosive, polishing the surface of the Cu film and the surface of the barrier metal film by CMP using pure water, thereafter cleaning the semiconductor substrate with pure water without applying an anticorrosive thereto or without cleaning it with a chemical liquid, and thereafter cleaning the semiconductor substrate with a chemical liquid without applying an anticorrosive thereto.

Abstract: To suppress or prevent the generation of a crack in an insulating film below an external terminal which could be caused by an external force added to the external terminal of a semiconductor device. A top wiring layer MH of wiring layers formed on a main surface of a silicon substrate has a pad comprising a conductor pattern containing aluminum. On an undersurface of the pad, there are arranged a barrier conductor film formed by laminating, from below, a first barrier conductor film and a second barrier conductor film. Of a fifth wiring layer which is one layer lower than the top wiring layer, in an area overlapping with a probe contact area of the pad in a plane, the conductor pattern is not arranged. Further, the first and second barrier conductor films are the conductor films including titanium and titanium nitride as principal components, respectively. Also, the first barrier conductor film is thicker than the second barrier conductor film.

Abstract: A contact and a copper interconnect line as an uppermost interconnect layer are buried in an interlayer insulating film. A pad area including aluminum alloy (such as AlCu or AlSiCu) is buried in a predetermined area of the copper interconnect line. A gold wire is bonded to the pad area.

Abstract: A semiconductor device capable of suppressing current concentration in a region where a side surface portion of a lower-level interconnect layer and a via plug which is misaligned with the lower-level interconnect layer are connected, is provided. A lower-level interconnect layer (2) including an anti-reflective film (conductive film) (2b) in a top surface portion thereof is formed on an underlying insulating film (1). An interlayer insulating film (3) is formed so as to cover the lower-level interconnect layer (2) and the underlying insulating film (1). To allow for misalignment between a via plug (4) extending from a top surface of the interlayer insulating film (3) to the lower-level interconnect layer (2) and the lower-level interconnect layer (2), a high resistance layer (5) is provided in a side surface portion of the lower-level interconnect layer (2).

Abstract: A contact (15) and a copper interconnect line (16) as an uppermost interconnect layer are buried in an interlayer insulating film (14). A pad area (17) including aluminum alloy (such as AlCu or AlSiCu) is buried in a predetermined area of the copper interconnect line (16). A gold wire (18) is bonded to the pad area (17).

Abstract: A barrier metal layer constituted of a TiN layer and a Ti layer is formed on a surface of an interlayer insulating film and on an inside surface of an interconnection recess formed in the interlayer insulating film while a substrate is maintained at a temperature of at least 200° C. and lower than 300° C. The interconnection recess is filled with a conductive layer and an extra part of the conductive layer that is deposited on the interlayer insulating film is removed through such a polishing process to form a conductive plug. In the process of forming the barrier metal layer, as the substrate is maintained at the temperature, the residual stress in the deposited barrier metal layer can be reduced. Accordingly, it is achieved to suppress peeling which occurs at the interface between the barrier metal layer and the interlayer insulating film in the polishing process.

Abstract: A semiconductor device has a multilayer interconnection structure in which a plurality of interconnection layers is formed in an insulating film. The multilayer interconnection structure has a first metal film made of a first material and functioning as a first interconnection belonging to an interconnection layer other than an uppermost interconnection layer, a second metal film made of a second material and functioning as a second interconnection belonging to the uppermost interconnection layer, a third metal film made of the first material and belonging to an interconnection layer other than the uppermost interconnection layer and functioning as a bonding pad, an opening formed in the insulating film and having its bottom defined by the third metal film, and a bonding wire connected to the third metal film through the opening. The second material has a lower resistance and is more susceptible to oxidation than the first material.