Patents by Inventor Hiroki YOSHII

Hiroki YOSHII has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light irradiation type heat treatment method
    Patent number: 10998214
    Abstract: A transportation preparation operation for transporting a semiconductor wafer from a treatment chamber is started before a temperature of the semiconductor wafer decreases to a transportable temperature. A gate valve is closed after a treatment on the semiconductor wafer is started, and an operation of transporting the semiconductor wafer into the treatment chamber is completed. A period of time for treating the semiconductor wafer and a period of time for transporting the semiconductor wafer in and out are overlapped with each other, thus a time required for transporting the semiconductor wafer W into and out of the treatment chamber can be reduced.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: May 4, 2021
    Assignee: SCREEN HOLDINGS CO., LTD.
    Inventors: Masashi Furukawa, Yoshio Ito, Hiroki Yoshii
  • LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD
    Publication number: 20190267270
    Abstract: A transportation preparation operation for transporting a semiconductor wafer from a treatment chamber is started before a temperature of the semiconductor wafer decreases to a transportable temperature. A gate valve is closed after a treatment on the semiconductor wafer is started, and an operation of transporting the semiconductor wafer into the treatment chamber is completed. A period of time for treating the semiconductor wafer and a period of time for transporting the semiconductor wafer in and out are overlapped with each other, thus a time required for transporting the semiconductor wafer W into and out of the treatment chamber can be reduced.
    Type: Application
    Filed: December 6, 2018
    Publication date: August 29, 2019
    Inventors: Masashi Furukawa, Yoshio ITO, Hiroki YOSHII