Abstract: A first etching rate of the first conductive film is calculated by acquiring correlation between an opening ratio of an etching mask and an etching rate of an etching target film, and then, performing a first dry etching to a first conductive film formed on a first wafer. Next, a second etching mask is formed on a second conductive film formed on a second wafer, and an etching time of the second conductive film is determined from the correlation between the opening ratio and the etching rate, the first etching rate, and a film thickness of the second conductive film when the second conductive film is subjected to a second dry etching in time-controlled etching.

Abstract: A first etching rate of the first conductive film is calculated by acquiring correlation between an opening ratio of an etching mask and an etching rate of an etching target film, and then, performing a first dry etching to a first conductive film formed on a first wafer. Next, a second etching mask is formed on a second conductive film formed on a second wafer, and an etching time of the second conductive film is determined from the correlation between the opening ratio and the etching rate, the first etching rate, and a film thickness of the second conductive film when the second conductive film is subjected to a second dry etching in time-controlled etching.

Abstract: A material for an organic electroluminescence device having the formula: wherein Ar1 and Ar3 each independently represent a substituted or unsubstituted phenylene group, X5 represents a substituted or unsubstituted naphthyl group or a substituted or unsubstituted phenanthryl group, X6 represents a substituted or unsubstituted phenyl group, and X7 and X8 each independently represent a substituted or unsubstituted biphenyl group or a substituted or unsubstituted terphenyl group. An organic electroluminescence device having (i) a light emitting layer, or (ii) a plurality of thin films of organic compounds having a light emitting layer, disposed between a pair of electrodes, wherein at least one of the thin films of organic compounds is a layer containing the material having the formula above.

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]: wherein A represents a chrysene group, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, a+b+c+d?0; general formula [2] being: wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsubstituted aryl group having 6 to 20 carbon atoms and n represents 0 or 1.

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]: wherein A represents a chrysene group, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, a+b+c+d?0; general formula [2] being: wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsubstituted aryl group having 6 to 20 carbon atoms and n represents 0 or 1.

Abstract: In the manufacturing system and the manufacturing method of a semiconductor device using a plasma treatment apparatus, a plasma treatment condition is controlled so that a desired shape is obtained after the plasma processing by using a processing shape prediction model for calculating the shape after the plasma processing from the inspection data of a wafer to be treated prior to the treatment and a response surface model for calculating the processing shape depending on a plasma treatment condition. In this configuration, the processing shape prediction model has an adjustable prediction model coefficient, and this prediction model coefficient is automatically calibrated.

Abstract: An organic electroluminescent device, including: a cathode; an anode; and organic layers including at least an emitting layer and an electron-transporting layer between the cathode and the anode, the electron-transporting material with the slowest electron mobility constituting the electron-transporting layer having an electron mobility of 2.0×10?5 cm2/Vs or more in an electric field intensity of 0.4 to 0.5 MV/cm, the electron mobility/hole mobility (?EM) of a host material constituting the emitting layer, and the electron mobility/hole mobility (?ET) of the electron-transporting material with the slowest electron mobility constituting the electron-transporting layer satisfying the following relationship: ?ET>1, 0.3??EM?10, and ?ET>?EM.

Abstract: The novel compound of the present invention has the diphenylanthracene structure at the center and a specific structure substituted with an aryl group at end portions. The organic electroluminescence device of the present invention comprises a plurality of layers of thin films of organic compounds which comprise a light emitting layer or a plurality of layers comprising a light emitting layer and are disposed between a pair of electrodes and at least one of the layers of thin films of organic compounds comprises the above novel compound. The novel compound exhibits excellent efficiency of light emission and heat resistance, has a long life and emits bluish-light having excellent purity of color and the organic electroluminescence device comprises the novel compound and exhibits the same advantageous properties.

Abstract: A compound having a diphenylanthracene structure at the center and a specific structure substituted with an aryl group at end portions. An organic electroluminescence device comprises a plurality of layers of thin films of organic compounds which comprise a light emitting layer or a plurality of layers comprising a light emitting layer and are disposed between a pair of electrodes and at least one of the layers of thin films of organic compounds comprises the above compound. The compound exhibits excellent efficiency of light emission and heat resistance, has a long life and emits bluish light having excellent purity of color and the organic electroluminescence device comprises the compound and exhibits the same advantageous properties.

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]: wherein A represents a chrysene group, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, a+b+c+d?0; general formula [2] being: wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsubstituted aryl group having 6 to 20 carbon atoms and n represents 0 or 1.

Abstract: Novel styryl compounds represented by the following general formulae (1) and (2): wherein R1 to R10 each independently represent hydrogen atom, an alkyl group, an alkoxyl group, an aryl group, an aryloxyl group, a condensed polycyclic group, a heterocyclic group, amino group, an alkylamino group, an arylamino group, cyano group, nitro group, hydroxyl group or a halogen atom, adjacent groups among groups represented by R1 to R10 may be bonded to each other and form a saturated or unsaturated carbon ring, and A, B, C, D, A?, B?, C? and D? each independently represent a substituted or unsubstituted alkyl group or aryl group having a specific structure; and an organic electroluminescence device comprising a film of organic compounds comprising at least a light emitting layer, wherein at least one of the layers of the film of organic compounds comprises the novel styryl compound.

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]: wherein A represents a chrysene group, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, a+b+c+d?0; general formula [2] being: wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsubstituted aryl group having 6 to 20 carbon atoms and n represents 0 or 1.

Abstract: A compound having a of the present invention has the diphenylanthracene structure at the center and a specific structure substituted with an aryl group at end portions. An organic electroluminescence device comprises a plurality of layers of thin films of organic compounds which comprise a light emitting layer or a plurality of layers comprising a light emitting layer and are disposed between a pair of electrodes and at least one of the layers of thin films of organic compounds comprises the above compound. The compound exhibits excellent efficiency of light emission and heat resistance, has a long life and emits bluish light having excellent purity of color and the organic electroluminescence device comprises the compound and exhibits the same advantageous properties.

Abstract: The novel compound of the present invention has the diphenylanthracene structure at the center and a specific structure substituted with an aryl group at end portions. The organic electroluminescence device of the present invention comprises a plurality of layers of thin films of organic compounds which comprise a light emitting layer or a plurality of layers comprising a light emitting layer and are disposed between a pair of electrodes and at least one of the layers of thin films of organic compounds comprises the above novel compound. The novel compound exhibits excellent efficiency of light emission and heat resistance, has a long life and emits bluish light having excellent purity of color and the organic electroluminescence device comprises the novel compound and exhibits the same advantageous properties.

Abstract: Novel styryl compounds represented by the following general formulae (1) and (2): wherein R1 to R10 each independently represent hydrogen atom, an alkyl group, an alkoxyl group, an aryl group, an aryloxyl group, a condensed polycyclic group, a heterocyclic group, amino group, an alkylamino group, an arylamino group, cyano group, nitro group, hydroxyl group or a halogen atom, adjacent groups among groups represented by R1 to R10 may be bonded to each other and form a saturated or unsaturated carbon ring, and A, B, C, D, A?, B?, C? and D? each independently represent a substituted or unsubstituted alkyl group or aryl group having a specific structure; and an organic electroluminescence device comprising a film of organic compounds comprising at least a light emitting layer, wherein at least one of the layers of the film of organic compounds comprises the novel styryl compound.

Abstract: Materials for organic electroluminescence devices represented by following general formula [1]: wherein A represents a substituted or unsubstituted arylene group having 22 to 60 carbon atoms, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, when the arylene group represented by A has 26 or less carbon atoms, a+b+c+d>0 and the arylene group does not contain two or more anthracene nucleus; general formula [2] being: wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsu

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]: general formula [1] wherein A represents a chrysene group X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, a+b+c+d?0; general formula [2] being: general formula [2] wherein R1 to R4 each independently represent hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, cyano group or form a triple bond by a linkage of R1 and R2 or R3 and R4, Z represents a substituted or unsubstituted aryl group having 6 to 20 carbon atoms and n represents 0 or 1.

Abstract: The novel compound of the present invention has the diphenylanthracene structure at the center and a specific structure substituted with an aryl group at end portions. The organic electroluminescence device of the present invention comprises a plurality of layers of thin films of organic compounds which comprise a light emitting layer or a plurality of layers comprising a light emitting layer and are disposed between a pair of electrodes and at least one of the layers of thin films of organic compounds comprises the above novel compound. The novel compound exhibits excellent efficiency of light emission and heat resistance, has a long life and emits bluish light having excellent purity of color and the organic electroluminescence device comprises the novel compound and exhibits the same advantageous properties.

Abstract: Materials for organic electroluminescence devices are represented by following general formula [1]:  wherein B represents a substituted or unsubstituted arylene group having 6 to 60 carbon atoms, X1 to X4 each independently represent a substituted or unsubstituted arylene group having 6 to 30 carbon atoms, X1 and X2 may be bonded to each other, X3 and X4 may be bonded to each other, Y1 to Y4 each independently represent an organic group represented by general formula [2], a to d each represent an integer of 0 to 2 and, when the arylene group represented by B has 26 or less carbon atoms, a+b+c+d>0 and at least one of the groups represented by B, X1, X2, X3 and X4 has a chrysene nucleus; general formula [2] being:

Abstract: Materials for organic electroluminescence devices and organic electroluminescence devices which exhibit high efficiency of light emission and have a long life and excellent heat resistance, novel compounds and processes for producing the materials for organic electroluminescence devices are provided.