Abstract: A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.

Abstract: A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.

Abstract: To provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid immersion microscope device of the present invention includes a supporting unit supporting a substrate as an observation target, an objective lens of a liquid immersion type, a first supplying unit supplying ultrapure water as a liquid for observation to a gap between a tip of the objective lens and the substrate, a first draining unit draining the liquid for observation after observation of the substrate, a second supplying unit supplying a liquid for cleaning, which is different from the liquid for observation drained by the first draining unit, to an area, of the substrate, that has been in contact with the liquid for observation, and a second draining unit draining the liquid for cleaning after the substrate is cleaned.

Abstract: A microscope apparatus efficiently supplies and collects a liquid for observation by local liquid immersion. The apparatus includes an objective of a liquid immersion system, a discharging member for discharging the liquid between a front edge of the objective and a substrate, and a sucking member for sucking the liquid. Inclined faces are provided respectively in two positions adjacent to the front edge in the periphery of the objective, and protruded portions are provided in positions adjacent to the inclined faces. An aperture portion bounded by the protruded portions and the substrate is formed at the side face. The discharging member includes a tubular member provided on the inclined face for discharging the liquid. The sucking member includes another tubular member for sucking the liquid while taking in air via the aperture portion.

Abstract: To provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid immersion microscope device of the present invention includes a supporting unit supporting a substrate as an observation target, an objective lens of a liquid immersion type, a first supplying unit supplying ultrapure water as a liquid for observation to a gap between a tip of the objective lens and the substrate, a first draining unit draining the liquid for observation after observation of the substrate, a second supplying unit supplying a liquid for cleaning, which is different from the liquid for observation drained by the first draining unit, to an area, of the substrate, that has been in contact with the liquid for observation, and a second draining unit draining the liquid for cleaning after the substrate is cleaned.

Abstract: To provide a microscope device capable of resolving a microscopic pattern beyond optical resolution of the microscope device. A microscope device includes, an image sensor, an enlarging optical system forming a magnified image of at least part of a target of observation on the image sensor, and an image processor applying an edge enhance filter having a differential function to a pictorial image obtained by the image sensor to obtain an edge enhanced pictorial image corresponding to the pictorial image, wherein the enlarging optical system includes a variable magnification optical system forming an image of a linear pattern included in an observation area on a surface of the target of observation, as the image having a width that exceeds a size of each of the pixels forming the image sensor and that is equal to or less than a width of an area handled by the edge enhance filter.

Abstract: A defect inspecting apparatus inspects defects of a sample having a pattern formed on the surface. The defect inspecting apparatus is provided with a stage which has a sample placed thereon and linearly moves and turns; a light source; an illuminating optical system, which selects a discretionary wavelength region from the light source and epi-illuminates the sample surface through a polarizer and an objective lens; a detecting optical system, which obtains a pupil image, by passing through reflection light applied by the illuminating optical system from the surface of the sample through the objective lens and an analyzer which satisfies the cross-nichols conditions with the polarizer; and a detecting section which detects defects of the sample by comparing the obtained pupil image with a previously stored pupil image. Conformity of the pattern on a substrate to be inspected can be judged in a short time.

Abstract: Providing a microscope apparatus supplying efficiently and collecting a liquid upon observation with local liquid immersion. The apparatus including an objective of a liquid immersion system, discharging means discharging the liquid between a front edge of the objective and a substrate, and sucking means sucking the liquid. Inclined faces are provided respectively in two positions adjacent to the front edge in the periphery of the objective, and protruded portions are provided in positions adjacent to the inclined faces. An aperture portion surrounded by the protruded portions and the substrate is formed in the side face. The discharging means includes a tubular member provided on the inclined face and the liquid is discharged by using the tubular member. The sucking means includes a tubular member and the liquid is sucked while taking in the air via the aperture portion by use of the tubular member.

Abstract: A microscope includes a microscope optical system that forms an enlarged image of an observation position by an immersion objective lens with an immersion liquid is filled between the observation position and the objective lens, a moving mechanism that moves a state that a first observation position among a plurality of observation positions on a substrate is positioned in a field of view of the microscope to another state that a second observation position is positioned in the field of view of the microscope, an immersion supplier that supplies the immersion liquid to fill between the objective lens and the observation position, an immersion remover that removes the immersion liquid filled between the objective lens and the observation position, and an immersion remove controller that makes the immersion remover remove the immersion liquid before operating the moving mechanism.

Abstract: The invention provides an AV signal processing apparatus and method by which a boundary between scenes is detected so that recorded video data can be played back beginning with an arbitrary scene. First, video data inputted is divided into video segments or audio segments or, if possible, into both of video and audio segments. Then, feature amounts representative of features of the segment are calculated, and then, similarity measurement between segments is performed using the feature amounts. Thereafter, it is discriminated whether or not the segment corresponds to a break of a scene.

Abstract: The invention provides an AV signal processing apparatus and method by which a boundary between scenes is detected so that recorded video data can be played back beginning with an arbitrary scene. First, video data inputted is divided into video segments or audio segments or, if possible, into both of video and audio segments. Then, feature amounts representative of features of the segment are calculated, and then, similarity measurement between segments is performed using the feature amounts. Thereafter, it is discriminated whether or not the segment corresponds to a break of a scene.

Abstract: A microscope includes a microscope optical system that forms an enlarged image of an observation position by an immersion objective lens with an immersion liquid is filled between the observation position and the objective lens, a moving mechanism that moves a state that a first observation position among a plurality of observation positions on a substrate is positioned in a field of view of the microscope to another state that a second observation position is positioned in the field of view of the microscope, an immersion supplier that supplies the immersion liquid to fill between the objective lens and the observation position, an immersion remover that removes the immersion liquid filled between the objective lens and the observation position, and an immersion remove controller that makes the immersion remover remove the immersion liquid before operating the moving mechanism.

Abstract: The invention provides an AV signal processing apparatus and method by which a boundary between scenes is detected so that recorded video data can be played back beginning with an arbitrary scene. First, video data inputted is divided into video segments or audio segments or, if possible, into both of video and audio segments. Then, feature amounts representative of features of the segment are calculated, and then, similarity measurement between segments is performed using the feature amounts. Thereafter, it is discriminated whether or not the segment corresponds to a break of a scene.

Abstract: The present invention relates to position detection, and aligning structure utilizing optical heterodyne method in semiconductor ultra fine processing or ultra accurate measuring. This is to provide a structure which contains pitches of not less than two kinds with respect to grating pitches of diffraction gratings which directly give influences to signal detecting range and detecting resolution, or which contains different values of not less than two kinds with respect to absolute values n of an order of .+-.n-th order injecting directions (or .+-.n-th order diffraction directions) to be determined by said grating pitches, so as to enable to enlarge a detecting range as maintaining a required detecting resolution (or a structure which can take out diffracted lights in different diffraction directions of not less than two).