Patents by Inventor Hiromi MISE
Hiromi MISE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230377836Abstract: Depth information of a multilayer structure is acquired quickly and with high accuracy. An analysis system includes (a) acquiring a first captured image of a sample SAM viewed from a first direction by irradiating the sample SAM including a multilayer structure with an electron beam EB1 from the first direction, (b) acquiring a second captured image of the sample SAM viewed from a second direction by irradiating the sample SAM with the electron beam EB1 from the second direction, in which the second direction intersects the first direction, (c) acquiring depth information of the multilayer structure using information of the sample SAM including the first captured image, the second captured image, a number of layers of the multilayer structure, a thickness of one layer or a thickness of each layer of the multilayer structure, and a depth at which a first layer of the multilayer structure starts.Type: ApplicationFiled: September 28, 2020Publication date: November 23, 2023Inventors: Azusa KONNO, Takashi SHIDARA, Ichiro FUJIMURA, Daiji KIRIHATA, Hiromi MISE
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Patent number: 11791131Abstract: A charged particle beam apparatus includes a movement mechanism, a particle source, an optical element, a detector, and a control mechanism configured to control, based on an observation condition, the movement mechanism, the particle source, the optical element, and the detector. The control mechanism is configured to acquire a diffraction pattern image including a plurality of Kikuchi lines as a comparison image after inclining the movement mechanism by a first angle, evaluate an error between an inclination angle of the sample and a target inclination angle using a reference image of a reference diffraction pattern and the comparison image, and control inclination of the movement mechanism based on an evaluation result.Type: GrantFiled: May 23, 2019Date of Patent: October 17, 2023Assignee: Hitachi High-Tech CorporationInventors: Takashi Dobashi, Hirokazu Tamaki, Hiromi Mise, Shuntaro Ito
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Patent number: 11756764Abstract: A charged particle beam apparatus includes: a movement mechanism; a particle source; an optical element; a detector; and a control mechanism, in which the control mechanism acquires a diffraction pattern including a plurality of Kikuchi lines, calculates a crystal zone axis of the sample by performing analysis based on a plurality of intersections at which two Kikuchi lines included in the diffraction pattern intersect with each other, calculates an inclination angle of the sample based on the crystal zone axis and an irradiation direction of the charged particle beam, and controls the moving mechanism based on the inclination angle.Type: GrantFiled: April 23, 2019Date of Patent: September 12, 2023Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Dobashi, Hirokazu Tamaki, Kuniyasu Nakamura, Hiromi Mise
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Patent number: 11742172Abstract: A charged particle beam device includes: a movement mechanism configured to hold and move a sample; a charged particle source configured to emit charged particles with which the sample is irradiated to obtain an image of the sample; and a control unit configured to control the movement mechanism to move the sample and to obtain the image of the sample. The control unit obtains a reference image of the sample in a reference arrangement state by the charged particles, generates a goal image of the sample in a target arrangement state different from the reference arrangement state by calculation from the reference image, moves the sample to each of different arrangement states by the movement mechanism, obtains a candidate image of the sample in each of the different arrangement states by the charged particles, and generates a comparison result between respective candidate images and the goal image.Type: GrantFiled: January 11, 2019Date of Patent: August 29, 2023Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takashi Dobashi, Hirokazu Tamaki, Hiromi Mise
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Publication number: 20220244201Abstract: Provided is a transmission electron microscope capable of obtaining a hollow-cone dark-field image and visually displaying irradiation conditions thereof. The transmission electron microscope is provided with an irradiation unit for irradiating a specimen with an electron beam, an objective lens for causing the electron beam transmitted through the specimen to form an image, beam deflectors for deflecting the electron beam, said beam deflectors being positioned higher than a position where the specimen is to be placed, an objective movable aperture for passing only a portion of the electron beam transmitted through the specimen, and a deflection coil control unit.Type: ApplicationFiled: April 26, 2019Publication date: August 4, 2022Inventors: Toshie YAGUCHI, Keiji TAMURA, Hiromi MISE, Yasuyuki NODERA, Akiko WAKUI, Keisuke IGARASHI
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Publication number: 20220230840Abstract: A charged particle beam device includes a charged particle beam device main body, a computer configured to control the charged particle beam device main body, including a CPU and a DRAM, and including software for controlling the charged particle beam device main body, a monitoring unit configured to monitor a resource usage status in the computer, an allocation availability determination unit configured to determine whether or not a resource for executing processing required by the software is allocatable in the computer according to a monitoring result of the monitoring unit, and a notification unit configured to notify, when the determination of the allocation availability determination unit is negative, information indicating that the determination is negative.Type: ApplicationFiled: May 29, 2019Publication date: July 21, 2022Inventors: Shuntaro ITO, Hiromi MISE
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Publication number: 20220230844Abstract: A charged particle beam apparatus includes a movement mechanism, a particle source, an optical element, a detector, and a control mechanism configured to control, based on an observation condition, the movement mechanism, the particle source, the optical element, and the detector. The control mechanism is configured to acquire a diffraction pattern image including a plurality of Kikuchi lines as a comparison image after inclining the movement mechanism by a first angle, evaluate an error between an inclination angle of the sample and a target inclination angle using a reference image of a reference diffraction pattern and the comparison image, and control inclination of the movement mechanism based on an evaluation result.Type: ApplicationFiled: May 23, 2019Publication date: July 21, 2022Applicant: Hitachi High-Tech CorporationInventors: Takashi DOBASHI, Hirokazu TAMAKI, Hiromi MISE, Shuntaro ITO
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Publication number: 20220216034Abstract: A charged particle beam apparatus includes: a movement mechanism; a particle source; an optical element; a detector; and a control mechanism, in which the control mechanism acquires a diffraction pattern including a plurality of Kikuchi lines, calculates a crystal zone axis of the sample by performing analysis based on a plurality of intersections at which two Kikuchi lines included in the diffraction pattern intersect with each other, calculates an inclination angle of the sample based on the crystal zone axis and an irradiation direction of the charged particle beam, and controls the moving mechanism based on the inclination angle.Type: ApplicationFiled: April 23, 2019Publication date: July 7, 2022Applicant: HITACHI HIGH-TECH CORPORATIONInventors: Takashi DOBASHI, Hirokazu TAMAKI, Kuniyasu NAKAMURA, Hiromi MISE
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Patent number: 11321585Abstract: Provided is an image classification device that facilitates efficient creation of teacher data and comprehensive evaluation on a basis of knowledge and experience of the user.Type: GrantFiled: April 14, 2017Date of Patent: May 3, 2022Assignee: Hitachi High-Tech CorporationInventors: Yaku Maeda, Akira Ikeuchi, Shigeru Kawamata, Hiromi Mise, Akira Sawaguchi
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Patent number: 11268915Abstract: To provide, in observation of a sample that requires a movement between various devices, a charged particle beam device, a method for processing the sample, and an observation method which facilitate the movement between the devices. The charged particle beam device that processes an observation target on the sample using a charged particle beam includes: a sample stage on which the sample is placed; an observation unit configured to observe the observation target; and a writing unit configured to write information of the observation target in a writing position of the sample.Type: GrantFiled: May 15, 2018Date of Patent: March 8, 2022Assignee: Hitachi High-Tech CorporationInventors: Tsunenori Nomaguchi, Hiromi Mise
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Publication number: 20220059313Abstract: A charged particle beam device includes: a movement mechanism configured to hold and move a sample; a charged particle source configured to emit charged particles with which the sample is irradiated to obtain an image of the sample; and a control unit configured to control the movement mechanism to move the sample and to obtain the image of the sample. The control unit obtains a reference image of the sample in a reference arrangement state by the charged particles, generates a goal image of the sample in a target arrangement state different from the reference arrangement state by calculation from the reference image, moves the sample to each of different arrangement states by the movement mechanism, obtains a candidate image of the sample in each of the different arrangement states by the charged particles, and generates a comparison result between respective candidate images and the goal image.Type: ApplicationFiled: January 11, 2019Publication date: February 24, 2022Inventors: Takashi Dobashi, Hirokazu Tamaki, Hiromi Mise
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Publication number: 20210190703Abstract: To provide, in observation of a sample that requires a movement between various devices, a charged particle beam device, a method for processing the sample, and an observation method which facilitate the movement between the devices. The charged particle beam device that processes an observation target on the sample using a charged particle beam includes: a sample stage on which the sample is placed; an observation unit configured to observe the observation target; and a writing unit configured to write information of the observation target in a writing position of the sample.Type: ApplicationFiled: May 15, 2018Publication date: June 24, 2021Inventors: Tsunenori NOMAGUCHI, Hiromi MISE
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Publication number: 20200125894Abstract: Provided is an image classification device that facilitates efficient creation of teacher data and comprehensive evaluation on a basis of knowledge and experience of the user.Type: ApplicationFiled: April 14, 2017Publication date: April 23, 2020Inventors: Yaku MAEDA, Akira IKEUCHI, Shigeru KAWAMATA, Hiromi MISE, Akira SAWAGUCHI
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Publication number: 20200056141Abstract: Provided is a charged particle beam apparatus capable of more objectively and highly accurately calculating a feature of a cell from an observation image of a cell and evaluating a cell. The charged particle beam apparatus includes an image acquisition unit 18 that acquires an image of a cell, a contour extraction unit 19 that extracts a contour of the image, a feature calculation unit 20 that calculates a morphological feature of the contour based on the contour and calculates the feature of an internal structure such as a cytoplasm contained in an internal area of the contour, and a determination unit 21 that determines quality and/or functionality of the cell based on the feature, and can objectively and highly accurately evaluate the quality and/or the functionality of the cell included in the captured image.Type: ApplicationFiled: April 14, 2017Publication date: February 20, 2020Inventors: Akira IKEUCHI, Shigeru KAWAMATA, Hiromi MISE, Akira SAWAGUCHI