Abstract: There is provided a magnetic deformable member that is deformable upon application of magnetism, and that has a front surface that projects toward the side opposite to a magnet when such a magnet is placed. The front surface provides variations in tactile feel or viewability for humans by providing a soft tactile feel. A magnetic deformable member includes: a flexible sheet; a back plate made of a hard material and stacked on the flexible sheet; a gel charged inside a space between the flexible sheet and the back plate; and a magnetic member having an annular shape as viewed in plan in a direction that is perpendicular to a front surface of the flexible sheet and having a length in the perpendicular direction. The magnetic member is secured to the flexible sheet, and disposed in the gel.

Abstract: A magnetic deformable member includes a magnetic portion formed of a magnetic elastic body, and a base portion formed of a non-magnetic elastic body to cover at least a side surface of the magnetic portion. At least the magnetic portion has a magnetic deformable portion in which shape deformation is caused by application of a magnetic field. The magnetic deformable portion is provided at a boundary-side end portion on the boundary with the base portion. A display portion in which the shape deformation is displayed is provided on a front surface s1 of the magnetic deformable member. With the magnetic deformable member, a tactile feel or viewability of the display portion can be varied by deforming the boundary between the magnetic portion and the base portion.

Abstract: There is provided a magnetic deformable member that is deformable upon application of magnetism, and that has a front surface that projects toward the side opposite to a magnet when such a magnet is placed. The front surface provides variations in tactile feel or viewability for humans by providing a soft tactile feel. A magnetic deformable member includes: a flexible sheet; a back plate made of a hard material and stacked on the flexible sheet; a gel charged inside a space between the flexible sheet and the back plate; and a magnetic member having an annular shape as viewed in plan in a direction that is perpendicular to a front surface of the flexible sheet and having a length in the perpendicular direction. The magnetic member is secured to the flexible sheet, and disposed in the gel.

Abstract: There is provided a magnetic deformable member that is deformable upon application of magnetism, and that has a front surface that projects toward the side opposite to a magnet when such a magnet is placed. The front surface provides variations in tactile feel or viewability for humans by providing a soft tactile feel. A magnetic deformable member 10 includes: a flexible sheet; a back plate made of a hard material and stacked on the flexible sheet; a gel charged inside a space between the flexible sheet and the back plate; and a magnetic member having an annular shape as viewed in plan in a direction that is perpendicular to a front surface of the flexible sheet and having a length in the perpendicular direction. The magnetic member is secured to the flexible sheet, and disposed in the gel.

Abstract: To make use of displacement of a magnetic elastic body caused by a magnetic field for a display portion of an electronic device or the like. A magnetic deformable member includes a magnetic portion formed of a magnetic elastic body, and a base portion formed of a non-magnetic elastic body to cover at least a side surface of the magnetic portion. At least the magnetic portion has a magnetic deformable portion in which shape deformation is caused by application of a magnetic field. The magnetic deformable portion is provided at a boundary-side end portion on the boundary with the base portion. A display portion in which the shape deformation is displayed is provided on a front surface s1 of the magnetic deformable member. With the magnetic deformable member, a tactile feel or viewability of the display portion can be varied by deforming the boundary between the magnetic portion and the base portion.

Abstract: Provided is an illumination optical system that illuminates a target illumination region by using light emitted from a discharge lamp. The system includes a condensing mirror that condenses the light from the discharge lamp, an optical integrator which has a polygonal cross-sectional shape and is arranged on an optical path from the condensing mirror to the target illumination region, an imaging optical system that forms an image on the target illumination region with respect to an exit end face of the optical integrator as an object plane, and a power supply cable connecting to an electrode of the discharge lamp across the optical path directed from the condensing mirror to the optical integrator. The cable is arranged so that a shadow of the cable is neither parallel nor perpendicular to each side of the polygon of an entrance surface of the optical integrator.

Abstract: An illumination optical device for illuminating a plane to be illuminated using light from a light source, includes: an optical integrator configured to cause an optical intensity distribution to be uniform on an emission end surface by reflecting light incident from an incident end surface in an inside surface a plurality of times; and a light flux forming unit configured to convert a light flux from a focal position where a condensing mirror condenses light from the light source at a first angle with respect to an optical axis directed from the light source to the plane to be illuminated to a light flux to be incident on the incident end surface of the optical integrator at a second angle greater than the first angle with respect to the optical axis, wherein the plane to be illuminated is illuminated with light from the optical integrator.

Abstract: A target object has an upper surface including a first surface and a second surface located below the first surface. A method of focusing an optical system includes: measuring a surface position of the first surface; measuring a surface position of the second surface; obtaining, based on a measurement results of the surface position of the first surface, an in-focus condition in which the optical system is focused on the first surface; obtaining information about a step amount between the first surface and the second surface based on the measurement results of the surface positions of the first surface and the second surface; and focusing the optical system on the second surface based on the in-focus condition and the information about the step amount.

Abstract: Provided is an illumination optical system that illuminates a target illumination region by using light emitted from a discharge lamp. The system includes a condensing mirror that condenses the light from the discharge lamp, an optical integrator which has a polygonal cross-sectional shape and is arranged on an optical path from the condensing mirror to the target illumination region, an imaging optical system that forms an image on the target illumination region with respect to an exit end face of the optical integrator as an object plane, and a power supply cable connecting to an electrode of the discharge lamp across the optical path directed from the condensing mirror to the optical integrator. The cable is arranged so that a shadow of the cable is neither parallel nor perpendicular to each side of the polygon of an entrance surface of the optical integrator.

Abstract: An illumination optical device for illuminating a plane to be illuminated using light from a light source, includes: an optical integrator configured to cause an optical intensity distribution to be uniform on an emission end surface by reflecting light incident from an incident end surface in an inside surface a plurality of times; and a light flux forming unit configured to convert a light flux from a focal position where a condensing mirror condenses light from the light source at a first angle with respect to an optical axis directed from the light source to the plane to be illuminated to a light flux to be incident on the incident end surface of the optical integrator at a second angle greater than the first angle with respect to the optical axis, wherein the plane to be illuminated is illuminated with light from the optical integrator.

Abstract: A target object has an upper surface including a first surface and a second surface located below the first surface. A method of focusing an optical system includes: measuring a surface position of the first surface; measuring a surface position of the second surface; obtaining, based on a measurement results of the surface position of the first surface, an in-focus condition in which the optical system is focused on the first surface; obtaining information about a step amount between the first surface and the second surface based on the measurement results of the surface positions of the first surface and the second surface; and focusing the optical system on the second surface based on the in-focus condition and the information about the step amount.

Abstract: An illumination optical apparatus guides to an illumination object a light beam emitted from a light source. The illumination optical apparatus includes an enlarging optical system, disposed between the light source and the illumination object, and a reduction optical system, disposed between the enlarging optical system and the illumination object. The enlarging optical system is formed so that an image plane is disposed between the light source and the illumination object.

Abstract: An exposure apparatus is configured to expose a pattern of an original on a substrate by using light from a light source. The exposure apparatus includes an illumination optical system configured to illuminate the original by polarized light by using the light from the light source, and a correction unit configured to correct misalignment of the optical axis of the light from the light source and the optical axis of the illumination optical system. The correction unit includes a first lens and a deflecting member, the first lens can move in a direction perpendicular to an optical axis of the lens, and a deflecting direction of the light deflected by the deflecting member is variable.

Abstract: An exposure apparatus is configured to expose a pattern of an original on a substrate by using light from a light source. The exposure apparatus includes an illumination optical system configured to illuminate the original by polarized light by using the light from the light source, and a correction unit configured to correct misalignment of the optical axis of the light from the light source and the optical axis of the illumination optical system. The correction unit includes a first lens and a deflecting member, the first lens can move in a direction perpendicular to an optical axis of the lens, and a deflecting direction of the light deflected by the deflecting member is variable.

Abstract: An exposure apparatus comprising an illumination optical system configured to illuminate a reticle with a light beam from a light source, and a projection optical system configured to project a pattern image of the reticle onto a substrate, the illumination optical system including a light-shielding member which is arranged near a plane conjugate to a pupil plane of the projection optical system and which can move along an optical axis of the illumination optical system, wherein the light-shielding member is moved such that a light intensity distribution on the pupil plane of the projection optical system becomes nonuniform.

Abstract: An illumination optical apparatus guides to an illumination object a light beam emitted from a light source. The illumination optical apparatus includes an enlarging optical system, disposed between the light source and the illumination object, and a reduction optical system, disposed between the enlarging optical system and the illumination object. The enlarging optical system is formed so that an image plane is disposed between the light source and the illumination object.

Abstract: An exposure apparatus comprising an illumination optical system configured to illuminate a reticle with a light beam from a light source, and a projection optical system configured to project a pattern image of the reticle onto a substrate, the illumination optical system including a light-shielding member which is arranged near a plane conjugate to a pupil plane of the projection optical system and which can move along an optical axis of the illumination optical system, wherein the light-shielding member is moved such that a light intensity distribution on the pupil plane of the projection optical system becomes nonuniform.

Abstract: An exposure apparatus for exposing a pattern of a reticle onto a substrate includes an illumination optical system configured to illuminate the reticle on a target plane to be illuminated using light from a light source, wherein the illumination optical system includes a computer-generated hologram configured to discretely form plural bright spots on a plane that has a Fourier transformation relationship with the target plane when the light that has no angular distribution is incident upon the computer-generated hologram, and an optical element configured to introduce the light that has an angular distribution to the computer-generated hologram.