Patents by Inventor Hiromi Tsuruta

Hiromi Tsuruta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pad conditioner cleaning apparatus
    Patent number: 6358124
    Abstract: A chemical mechanical polishing apparatus includes a pad conditioner having a conditioner head, a cleaning cup for receiving and cleaning the conditioner head of the pad conditioner, and a fluid dispenser for dispensing a cleaning fluid onto the conditioner head.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: March 19, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker, Bruce Lu, Rex Lu, K. Y. Wang, Roland Shu
  • Pad conditioner cleaning apparatus
    Patent number: 6217430
    Abstract: A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: April 17, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker
  • Semiconductor testing device with redundant circuits
    Patent number: 5994914
    Abstract: In a semiconductor testing device, the defective data of a semiconductor device which is detected by a defective detection unit 1 are converted to address data on the basis of inherent information such as the cell size, the divisional size, etc. of the semiconductor device by an address conversion unit 2, and the address data are compared with a redundant circuit area of the semiconductor device to make a quality (defective or non-defective) judgment of the semiconductor device by a judgment unit 3, whereby when any defective exists in the semiconductor device, the judgment as to whether the defective is replaceable (relievable) by the redundant circuits can be more accurately performed.
    Type: Grant
    Filed: July 25, 1997
    Date of Patent: November 30, 1999
    Assignee: NEC Corporation
    Inventor: Hiromi Tsuruta