Abstract: In a wafer processing method, an ingot is sliced into a wafer and the wafer is planarized by polishing a surface of the wafer. When the wafer is planarized, the wafer is disposed on a wafer holder and the wafer is rotated, a heat quantity is applied to a portion of the wafer so as to form a reformed layer at the portion of the wafer, and a polishing tool is brought into contact with the portion of wafer while rotating so as to polish the portion of the wafer.

Abstract: In a wafer processing method, an ingot is sliced into a wafer and the wafer is planarized by polishing a surface of the wafer. When the wafer is planarized, the wafer is disposed on a wafer holder and the wafer is rotated, a heat quantity is applied to a portion of the wafer so as to form a reformed layer at the portion of the wafer, and a polishing tool is brought into contact with the portion of wafer while rotating so as to polish the portion of the wafer.

Abstract: A burr removing device for removing a burr, which is formed at a connection between a first hole and a second hole that are angled relative to each other inside a workpiece. According to the burr removing device, a generated high-density energy beam is converged by a converging lens, which is located outside of the first and second holes of the workpiece. Then, the converged high-density energy beam is reflected toward the burr by a one reflecting mirror, which is located in one of the first and second holes.

Abstract: A fuel injector has an orifice member having an aperture for injecting atomizing and metering fuel. The orifice member is made of a plate material. The orifice member is machined to form the aperture. Then, the orifice member is processed by at least two shot blasting process in opposite directions to remove burrs and trim edges of the aperture. After the process, the orifice plate is inspected by measuring an actual flow rate of the aperture. Then, the orifice plate is processed by a shot blasting process again in accordance with the measured flow rate and a target flow rate.

Abstract: In a machine tool by pulse drive of a hydraulic system, a piston of a hydraulic cylinder is connected with a table, and an outflow valve and an inflow valve, which form a pair, are respectively connected with a right and a left hydraulic chamber. When the feed table is moved to the right, for example, control is conducted so that the valve-opening period of one valve can be a portion in the middle of the valve-opening period of the other valve. Since a portion of pressure in the hydraulic chamber is canceled, an effective pressure, the pulse width of which is narrow, remains. Accordingly, even in the case where a common inexpensive electromagnetic valve is used, it is possible to accomplish a smooth feed motion.

Abstract: A fuel injector has an orifice member having an aperture for injecting atomizing and metering fuel. The orifice member is made of a plate material. The orifice member is machined to form the aperture. Then, the orifice member is processed by at least two shot blasting process in opposite directions to remove burrs and trim edges of the aperture. After the process, the orifice plate is inspected by measuring an actual flow rate of the aperture. Then, the orifice plate is processed by a shot blasting process again in accordance with the measured flow rate and a target flow rate.

Abstract: A method of charging a hole (24) in a substrate (23) with fluid material (50) comprises the steps of supplying the fluid material (50) onto a surface of the substrate (23); and forcing the fluid material (50) into the hole (24) along at least three different directions on the surface of the substrate (23) to charge the hole (24) with the fluid material (50). The forcing step may comprise using a forcing means (9) placed on the surface of the substrate (23) in forcing the fluid material (50) into the hole (24); and rotating the forcing means (9) about an axis perpendicular to the surface of the substrate (23) and moving the axis of rotation of the forcing member (9) along the surface of the substrate (23) to force the fluid material (50) into the hole (24) along the at least three different directions.

Abstract: In a machine tool by pulse drive of a hydraulic system, a piston of a hydraulic cylinder is connected with a table, and an outflow valve and an inflow valve, which form a pair, are respectively connected with a right and a left hydraulic chamber. When the feed table is moved to the right, for example, control is conducted so that the valve-opening period of one valve can be a portion in the middle of the valve-opening period of the other valve. Since a portion of pressure in the hydraulic chamber is canceled, an effective pressure, the pulse width of which is narrow, remains. Accordingly, even in the case where a common inexpensive electromagnetic valve is used, it is possible to accomplish a smooth feed motion.

Abstract: An electrode feeding apparatus for electric-discharge machining by discharging between an electrode and a workpiece in order to machine the workpiece includes an occurrence frequency detecting unit for detecting the occurrence frequency of short-circuit current flowing when the electrode contacts the workpiece and a penetration detecting unit for detecting penetration by the electrode to the workpiece based on the occurrence frequency. According to the present invention, it is possible to detect with high precision penetration by the electrode into the workpiece by utilizing the difference between an occurrence frequency of short-circuit current during electrode discharge machine and the occurrence frequency of the short-circuit current when the electrode has penetrated the workpiece.