Abstract: A defect inspection device includes: an illumination optical system including a polarization element configured to switch polarization of irradiation light between first polarization and second polarization orthogonal to the first polarization; a polarization diffraction grating configured to emit diffraction light of a specific order of the irradiation light in a direction along a normal line of a sample stage surface, a diffraction efficiency of the specific order of the first polarization of the irradiation light is equal to or less than 20% of a diffraction efficiency of the specific order of the second polarization, the polarization diffraction grating being settable at a light collection position of the irradiation light on the sample stage surface and including an anisotropic pattern whose period is equal to or less than twice a wavelength of the irradiation light; a detection optical system.

Abstract: A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

Abstract: A defect inspection apparatus includes an illumination unit configured to irradiate a surface of a sample with a linear illumination spot; a condensing detection unit configured to condense reflected light of the illumination spot and to control a polarization state of the incident light to form an optical image; and a sensor unit configured to output the optical image and including an array-shaped light receiving portion and an antireflection film at a position conjugate with the illumination spot, in which the condensing detection unit includes a polarization control unit configured to increase light incident efficiency to the sensor unit. The normal line of the light receiving surface of the sensor unit is inclined from the optical axis of the condensing detection unit by 10 degrees or more and less than 80 degrees. The light condensing detection unit increases the optical magnification in the lateral direction of the illumination spot.

Abstract: Provided is a waveguide having a light diffraction unit that diffracts incident light by a multiplex-recorded hologram, in which, in the light diffraction unit, a plurality of holograms having different angles with respect to an incident surface of the waveguide are formed, and when certain parallel light beams are incident, different wavelengths are diffracted by the plurality of holograms.

Abstract: It is an objective of this disclosure to protect a highly transparent hologram light guide plate from water vapor and ultraviolet ray, thereby suppressing deterioration of the hologram light guide plate even when employed in a head mount display used in outdoor environments. A hologram light guide plate according to this disclosure comprises a protection layer that protects a hologram layer and an intermediate layer that is placed between a glass layer and the protection layer, wherein the glass layer and the hologram layer form a transfer layer that transfers image light. The intermediate layer causes the image light to transfer only in the transfer layer in a section from an input area of the image light to an output area of the image light.

Abstract: Provided is a waveguide having a light diffraction unit that diffracts incident light by a multiplex-recorded hologram, in which, in the light diffraction unit, a plurality of holograms having different angles with respect to an incident surface of the waveguide are formed, and when certain parallel light beams are incident, different wavelengths are diffracted by the plurality of holograms.

Abstract: It is an objective of this disclosure to protect a highly transparent hologram light guide plate from water vapor and ultraviolet ray, thereby suppressing deterioration of the hologram light guide plate even when employed in a head mount display used in outdoor environments. A hologram light guide plate according to this disclosure comprises a protection layer that protects a hologram layer and an intermediate layer that is placed between a glass layer and the protection layer, wherein the glass layer and the hologram layer form a transfer layer that transfers image light. The intermediate layer causes the image light to transfer only in the transfer layer in a section from an input area of the image light to an output area of the image light.