Patents by Inventor Hiromitsu AKAE

Hiromitsu AKAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11804391
    Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.
    Type: Grant
    Filed: June 15, 2022
    Date of Patent: October 31, 2023
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
  • Patent number: 11749553
    Abstract: A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: September 5, 2023
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Masanobu Harada, Hiromitsu Akae, Norihisa Iwasaki
  • Patent number: 11701785
    Abstract: A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.
    Type: Grant
    Filed: December 21, 2021
    Date of Patent: July 18, 2023
    Inventors: Go Yamaguchi, Hiromitsu Akae, Kensuke Oni, Osamu Komiyaji
  • Patent number: 11462435
    Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: October 4, 2022
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Go Yamaguchi, Hiromitsu Akae
  • Publication number: 20220310423
    Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.
    Type: Application
    Filed: June 15, 2022
    Publication date: September 29, 2022
    Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
  • Patent number: 11417550
    Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: August 16, 2022
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
  • Publication number: 20220111539
    Abstract: The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.
    Type: Application
    Filed: December 21, 2021
    Publication date: April 14, 2022
    Inventors: Go YAMAGUCHI, Hiromitsu AKAE, Kensuke ONI, Osamu KOMIYAJI
  • Publication number: 20210242052
    Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.
    Type: Application
    Filed: December 10, 2020
    Publication date: August 5, 2021
    Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
  • Publication number: 20210155421
    Abstract: A conveying system includes a guide constituting a conveying path, a carrier configured to move along the conveying path, a magnetic member provided on one of the guide and the carrier so as to be arranged along the conveying path, a plurality of coils provided on the other one of the guide and the carrier and configured to generate thrust along the conveying path by generating a moving magnetic field acting on the magnetic member in accordance with supply of power, a magnetic sensor configured to detect magnetism varying with a movement of the carrier, and a controller which is configured to execute position detection of a first method of obtaining a position of the carrier based on inductance variation of the coil and execute position detection of a second method of obtaining a position of the carrier based on an output of the magnetic sensor.
    Type: Application
    Filed: February 3, 2021
    Publication date: May 27, 2021
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Minoru KOGA, Hiromitsu AKAE, Yuki HONDA, Mina ORII, Go YAMAGUCHI, Sohei OGA, Hidenori HARA
  • Publication number: 20210151343
    Abstract: A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.
    Type: Application
    Filed: November 6, 2020
    Publication date: May 20, 2021
    Inventors: Masanobu HARADA, Hiromitsu AKAE, Norihisa IWASAKI
  • Publication number: 20210143047
    Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.
    Type: Application
    Filed: November 6, 2020
    Publication date: May 13, 2021
    Inventors: Go YAMAGUCHI, Hiromitsu AKAE
  • Patent number: 10947066
    Abstract: A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: March 16, 2021
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Minoru Koga, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
  • Publication number: 20190315580
    Abstract: A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.
    Type: Application
    Filed: June 28, 2019
    Publication date: October 17, 2019
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Minoru KOGA, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
  • Patent number: 10336559
    Abstract: A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: July 2, 2019
    Assignee: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Minoru Koga, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
  • Publication number: 20180079605
    Abstract: A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.
    Type: Application
    Filed: November 28, 2017
    Publication date: March 22, 2018
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Minoru KOGA, Hiromitsu AKAE, Yuki HONDA, Mina ORII, Go YAMAGUCHI, Sohei OGA, Hidenori HARA
  • Publication number: 20160074271
    Abstract: A training device for training a limb includes target parts to be touched with the limb and a force generator that generates a lifting force acting upward on the limb by electricity in a manner allowing the limb to move upward and downward.
    Type: Application
    Filed: November 20, 2015
    Publication date: March 17, 2016
    Applicants: KAGOSHIMA UNIVERSITY, KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Keijiro MISU, Hiromitsu AKAE, Toshiyuki KlTANO, Mitsunori KAWABE, Hidenori TOMISAKI, Kazumi KAWAHIRA, Megumi SHIMODOZONO, Yong YU, Ryota HAYASHI
  • Patent number: 8910984
    Abstract: An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: December 16, 2014
    Assignee: Kabushiki Kaisha Yaskawa Denki
    Inventor: Hiromitsu Akae
  • Publication number: 20140148293
    Abstract: The composite drive device includes a first output shaft supported rotatably around its axis, a first differential mechanism and a second differential mechanism arranged to face each other on the first output shaft, a first power source driving the first differential mechanism and a second power source driving the second differential mechanism, and a second output shaft being provided in a direction orthogonal to the first output shaft between the first differential mechanism and the second differential mechanism and being rotatable around its axis in conjunction with driving of the first differential mechanism and the second differential mechanism.
    Type: Application
    Filed: January 30, 2014
    Publication date: May 29, 2014
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: Hiromitsu AKAE
  • Publication number: 20140117686
    Abstract: An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.
    Type: Application
    Filed: January 8, 2014
    Publication date: May 1, 2014
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventor: Hiromitsu AKAE