Patents by Inventor Hiromitsu AKAE
Hiromitsu AKAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11804391Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: June 15, 2022Date of Patent: October 31, 2023Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Patent number: 11749553Abstract: A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.Type: GrantFiled: November 6, 2020Date of Patent: September 5, 2023Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Masanobu Harada, Hiromitsu Akae, Norihisa Iwasaki
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Patent number: 11701785Abstract: A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: GrantFiled: December 21, 2021Date of Patent: July 18, 2023Inventors: Go Yamaguchi, Hiromitsu Akae, Kensuke Oni, Osamu Komiyaji
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Patent number: 11462435Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.Type: GrantFiled: November 6, 2020Date of Patent: October 4, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Go Yamaguchi, Hiromitsu Akae
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Publication number: 20220310423Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: June 15, 2022Publication date: September 29, 2022Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Patent number: 11417550Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: December 10, 2020Date of Patent: August 16, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20220111539Abstract: The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Inventors: Go YAMAGUCHI, Hiromitsu AKAE, Kensuke ONI, Osamu KOMIYAJI
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Publication number: 20210242052Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: December 10, 2020Publication date: August 5, 2021Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Publication number: 20210155421Abstract: A conveying system includes a guide constituting a conveying path, a carrier configured to move along the conveying path, a magnetic member provided on one of the guide and the carrier so as to be arranged along the conveying path, a plurality of coils provided on the other one of the guide and the carrier and configured to generate thrust along the conveying path by generating a moving magnetic field acting on the magnetic member in accordance with supply of power, a magnetic sensor configured to detect magnetism varying with a movement of the carrier, and a controller which is configured to execute position detection of a first method of obtaining a position of the carrier based on inductance variation of the coil and execute position detection of a second method of obtaining a position of the carrier based on an output of the magnetic sensor.Type: ApplicationFiled: February 3, 2021Publication date: May 27, 2021Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru KOGA, Hiromitsu AKAE, Yuki HONDA, Mina ORII, Go YAMAGUCHI, Sohei OGA, Hidenori HARA
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Publication number: 20210151343Abstract: A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.Type: ApplicationFiled: November 6, 2020Publication date: May 20, 2021Inventors: Masanobu HARADA, Hiromitsu AKAE, Norihisa IWASAKI
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Publication number: 20210143047Abstract: A robot includes: a first arm that is a horizontal multi-joint type arm provided with a first base link provided to be rotatable around a pivoting axis, a first intermediate link, and a first hand that holds a workpiece W thereon, and configured to move the first hand along a first diameter direction; a second arm that is a horizontal multi-joint type arm provided with a second base link provided to be independently rotatable from the first base link around the pivoting axis, a second intermediate link, and a second hand that holds the workpiece W thereon, and configured to move the second hand along a second diameter direction, and a pivoting device configured to pivot the first arm and the second arm together in the circumferential direction while maintaining a positional relationship of the first arm and the second arm in the circumferential direction.Type: ApplicationFiled: November 6, 2020Publication date: May 13, 2021Inventors: Go YAMAGUCHI, Hiromitsu AKAE
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Patent number: 10947066Abstract: A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.Type: GrantFiled: June 28, 2019Date of Patent: March 16, 2021Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru Koga, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
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Publication number: 20190315580Abstract: A conveying system includes a plurality of carriers and circuitry. The plurality of carriers has a power source generating thrust in accordance with supply of power and moves along a conveying path. The circuitry is configured to execute detection of a collision between the carriers based on an increase in the thrust in the carriers.Type: ApplicationFiled: June 28, 2019Publication date: October 17, 2019Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru KOGA, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
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Patent number: 10336559Abstract: A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.Type: GrantFiled: November 28, 2017Date of Patent: July 2, 2019Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru Koga, Hiromitsu Akae, Yuki Honda, Mina Orii, Go Yamaguchi, Sohei Oga, Hidenori Hara
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Publication number: 20180079605Abstract: A conveying system includes at least one guide unit and a carrier. The guide unit includes a traveling surface, at least one guide rail, and a magnetic member formed of a soft magnetic material and including a plurality of salient poles aligned along a conveying path. The carrier includes at least one roller coming in contact with the guide rail from a side direction, at least one wheel coming in contact with the traveling surface, and a plurality of coils provided to overlap with the magnetic member in plan view, and configured to generate thrust along the conveying path and attraction toward the magnetic member by generating a moving magnetic field acting on the magnetic member in accordance with supply of power.Type: ApplicationFiled: November 28, 2017Publication date: March 22, 2018Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Minoru KOGA, Hiromitsu AKAE, Yuki HONDA, Mina ORII, Go YAMAGUCHI, Sohei OGA, Hidenori HARA
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Publication number: 20160074271Abstract: A training device for training a limb includes target parts to be touched with the limb and a force generator that generates a lifting force acting upward on the limb by electricity in a manner allowing the limb to move upward and downward.Type: ApplicationFiled: November 20, 2015Publication date: March 17, 2016Applicants: KAGOSHIMA UNIVERSITY, KABUSHIKI KAISHA YASKAWA DENKIInventors: Keijiro MISU, Hiromitsu AKAE, Toshiyuki KlTANO, Mitsunori KAWABE, Hidenori TOMISAKI, Kazumi KAWAHIRA, Megumi SHIMODOZONO, Yong YU, Ryota HAYASHI
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Patent number: 8910984Abstract: An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.Type: GrantFiled: January 8, 2014Date of Patent: December 16, 2014Assignee: Kabushiki Kaisha Yaskawa DenkiInventor: Hiromitsu Akae
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Publication number: 20140148293Abstract: The composite drive device includes a first output shaft supported rotatably around its axis, a first differential mechanism and a second differential mechanism arranged to face each other on the first output shaft, a first power source driving the first differential mechanism and a second power source driving the second differential mechanism, and a second output shaft being provided in a direction orthogonal to the first output shaft between the first differential mechanism and the second differential mechanism and being rotatable around its axis in conjunction with driving of the first differential mechanism and the second differential mechanism.Type: ApplicationFiled: January 30, 2014Publication date: May 29, 2014Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventor: Hiromitsu AKAE
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Publication number: 20140117686Abstract: An object is to provide a robot hand and a robot that are compact and lightweight and can reliably hold various types of workpieces. To achieve this object, the robot hand and the robot include: a plurality of joint portions that rotates about respective rotation axes parallel with each other; a plurality of links that is connected via each of the joint portions in sequence from a distal end; a linking member that links rotations of the joint portions adjacent to each other; and a single drive source that drives only the joint portion at a proximal end to rotate the joint portion.Type: ApplicationFiled: January 8, 2014Publication date: May 1, 2014Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventor: Hiromitsu AKAE