Abstract: This invention relates to a production planning system that judges whether or not production can be carried out in accordance not only with a request from a sales side and a demand forecast but also with a production request number or a maximum producible number of sets for each product. In the invention, production request number information of products, parts list information and information about inventory and inventory schedule of each of parts are accepted. When a calculation processing unit calculates a material necessary amount and makes a production plan of the product, it makes the production plan setting a production infeasible number as a new necessary number to a date later than a date designated by the production request information if any production infeasible number of sets exists. Surplus parts information not linked with the production plan is generated and a production addable number is calculated for each product.

Abstract: This invention relates to a production planning system that judges whether or not production can be carried out in accordance not only with a request from a sales side and a demand forecast but also with a production request number or a maximum producible number of sets for each product. In the invention, production request number information of products, parts list information and information about inventory and inventory schedule of each of parts are accepted. When a calculation processing unit calculates a material necessary amount and makes a production plan of the product, it makes the production plan setting a production infeasible number as a new necessary number to a date later than a date designated by the production request information if any production infeasible number of sets exists. Surplus parts information not linked with the production plan is generated and a production addable number is calculated for each product.

Abstract: A substrate drying apparatus comprises a treatment vessel for containing IPA in the form of liquid, an IPA source for supplying IPA into the treatment vessel, a first heat exchanger which is equipped with a heat exchanger tube dipped in IPA and allowing steam to pass therein, the first heat exchanger allowing the steam and IPA to perform heat exchange therebetween to thereby evaporate IPA, and a second heat exchanger provided on or above an upper portion of the treatment vessel and equipped with a heat exchanger tube for allowing a coolant to pass therein, the second heat exchanger allowing the coolant and the evaporated IPA to perform heat exchange therebetween to thereby condense the evaporated IPA.