Abstract: A method is for manufacturing a microstructure having a thin-walled portion with use of a material substrate. The material substrate has a laminated structure which includes a first conductor layer 101, a second conductor layer 102, a third conductor layer 103, a first insulating layer 104 interposed between the first conductor layer and the second conductor layer, and a second insulating layer 105 interposed between the second conductor layer and the third conductor layer. The first insulating layer is patterned to have a first masking part for covering a thin-wall forming region of the second conductor layer. The second insulating layer is patterned to have a second masking part for covering the thin-wall forming region of the second conductor layer.

Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

Abstract: A micro mirror unit includes a micro mirror substrate, a wiring substrate and an electroconductive spacer disposed between these substrates. The micro mirror substrate includes a moving part, a frame and torsion bars connecting the moving part to the frame. The moving part is provided with a mirror-formed portion. The wiring substrate is formed with a wiring pattern. The electroconductive spacer electrically connects the frame to the wiring pattern, while also providing a space between the micro mirror substrate and the wiring substrate.

Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

Abstract: A nozzle plate to be mounted on an ink jet print head includes a plate body on which is formed a plurality of jet aperture portions from which ink is jetted and a water-repellant film formed on this plate body. The diameter of jet aperture portions formed on the plate body and the diameter of water-repellant film apertures formed on the water-repellant film so as to connect with the nozzle apertures are the same diameter R3, so the ink jet flow can be accurately controlled.

Abstract: A micro mirror unit includes a micro mirror substrate, a wiring substrate and an electroconductive spacer disposed between these substrates. The micro mirror substrate includes a moving part, a frame and torsion bars connecting the moving part to the frame. The moving part is provided with a mirror-formed portion. The wiring substrate is formed with a wiring pattern. The electroconductive spacer electrically connects the frame to the wiring pattern, while also providing a space between the micro mirror substrate and the wiring substrate.

Abstract: An ink-jet head includes a head portion having a plurality of head segments and an ink feeding portion, where ink is supplied such that pipes each have one end connected to the head portion and the other end connected to one of ink feeding paths of the ink feeding portion. The pipes are held by elastic ring-shaped members that are further sidewise held by rigid ring-shaped members and vertically sandwiched between the ink feeding paths and an upper end portion of the head portion.

Abstract: The instant invention has an exemplified object to provide an inkjet head and recording device having such an inkjet head with a simpler structure as achieves higher quality of printing inexpensively than the conventional. The pressure-chamber plate of this invention is slit or divided into a plurality of elements.

Abstract: It is an exemplified object of the present invention to provide an inkjet head, its manufacturing method, and a recording device that can form a high-quality image while preventing an ink leakage. To accomplish the object, an indent is provided at a joint surface of a pressure chamber plate with an adhesive.

Abstract: The ink jet printer includes a pressure chamber plate having a plurality of pressure chambers 20 separated by bulkheads, and a piezoelectric member having drive sections arranged opposite to the pressure chambers via a vibrating plate. The drive sections are separated from each other by parallel extending grooves. The piezoelectric member has inner electrodes 32 embedded therein and exposed to the side surfaces of the drive sections. The exposed portions of the inner electrodes are covered by insulating members, so that no short circuit is caused between the inner electrodes provided in the piezoelectric member.