Abstract: To provide a vacuum processing apparatus, wherein only a chamber having a lower vacuum pressure, is vented to atmosphere, in case the chamber having the lower vacuum pressure, requires maintenance and such. Disclosed is a vacuum processing apparatus comprising a first vacuum chamber evacuated to a predetermined vacuum pressure; a second vacuum chamber evacuated to a lower vacuum pressure than the first vacuum chamber; a gate lock chamber connecting the first vacuum chamber and the second vacuum chamber; a first gate valve (GV1) opening and closing between the first vacuum chamber and the gate lock chamber; and a second gate valve (GV2) opening and closing between the second vacuum chamber and the gate lock chamber.