Patents by Inventor Hiromitusu Mashita

Hiromitusu Mashita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask pattern generating method and computer program product
    Patent number: 8609303
    Abstract: According to a mask pattern generating method of the embodiments, an undesired pattern, which is transferred onto a substrate due to an auxiliary pattern when an on-substrate pattern is formed on the substrate by using a mask pattern in which the auxiliary pattern is placed, is extracted as an undesired transfer pattern. Then, the mask pattern is corrected by changing a size of the auxiliary pattern according to a size and a position of the undesired transfer pattern.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: December 17, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Chikaaki Kodama, Toshiya Kotani, Hiromitusu Mashita, Fumiharu Nakajima
  • MASK PATTERN GENERATING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND COMPUTER PROGRAM PRODUCT
    Publication number: 20120183906
    Abstract: According to a mask pattern generating method of the embodiments, an undesired pattern, which is transferred onto a substrate due to an auxiliary pattern when an on-substrate pattern is formed on the substrate by using a mask pattern in which the auxiliary pattern is placed, is extracted as an undesired transfer pattern. Then, the mask pattern is corrected by changing a size of the auxiliary pattern according to a size and a position of the undesired transfer pattern.
    Type: Application
    Filed: September 20, 2011
    Publication date: July 19, 2012
    Inventors: Chikaaki KODAMA, Toshiya Kotani, Hiromitusu Mashita, Fumiharu Nakajima