Patents by Inventor Hiromu Ishii
Hiromu Ishii has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8634121Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: GrantFiled: March 5, 2012Date of Patent: January 21, 2014Assignee: Nippon Telegraph and Telephone CorporationInventors: Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Patent number: 8582189Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: GrantFiled: March 5, 2012Date of Patent: November 12, 2013Assignee: Nippon Telegraph and Telephone CorporationInventors: Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Patent number: 8462410Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: GrantFiled: March 5, 2012Date of Patent: June 11, 2013Assignee: Nippon Telegraph and Telephone CorporationInventors: Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Publication number: 20120162735Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: ApplicationFiled: March 5, 2012Publication date: June 28, 2012Inventors: Shingo Uchiyama, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Publication number: 20120162737Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: ApplicationFiled: March 5, 2012Publication date: June 28, 2012Inventors: Shingo Uchiyama, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Publication number: 20120162736Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: ApplicationFiled: March 5, 2012Publication date: June 28, 2012Inventors: Shingo UCHIYAMA, Johji YAMAGUCHI, Makoto SATO, Kunihiko SASAKURA, Hirofumi MORITA, Shuichiro INAGAKI, Katsuyuki MACHIDA, Hiromu ISHII, Makoto MURAKAMI
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Patent number: 8149489Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: GrantFiled: December 28, 2005Date of Patent: April 3, 2012Assignee: Nippon Telegraph and Telephone CorporationInventors: Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii, Makoto Murakami
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Patent number: 7978388Abstract: When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.Type: GrantFiled: December 27, 2006Date of Patent: July 12, 2011Assignee: Nippon Telegraph and Telephone CorporationInventors: Shingo Uchiyama, Fusao Shimokawa, Johji Yamaguchi, Kunihiko Sasakura, Hiromu Ishii
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Publication number: 20090244676Abstract: When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.Type: ApplicationFiled: December 27, 2006Publication date: October 1, 2009Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATIONInventors: Shingo Uchiyama, Fusao Shimokawa, Johji Yamaguchi, Kunihiko Sasakura, Hiromu Ishii
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Patent number: 7482196Abstract: In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.Type: GrantFiled: January 11, 2006Date of Patent: January 27, 2009Assignee: Nippon Telegraph and Telephone CorporationInventors: Masami Urano, Hiromu Ishii, Toshishige Shimamura, Yasuyuki Tanabe, Katsuyuki Machida, Tomomi Sakata
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Publication number: 20080100899Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.Type: ApplicationFiled: December 28, 2005Publication date: May 1, 2008Inventors: Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura, Hirofumi Morita, Shuichiro Inagaki, Katsuyuki Machida, Hiromu Ishii
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Patent number: 7360293Abstract: A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.Type: GrantFiled: April 7, 2005Date of Patent: April 22, 2008Assignee: Nippon Telegraph and Telephone CorporationInventors: Norio Sato, Katsuyuki Machida, Hakaru Kyuragi, Satoshi Shigematsu, Hiroki Morimura, Hiromu Ishii, Toshishige Shimamura
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Patent number: 7208809Abstract: In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.Type: GrantFiled: September 17, 2003Date of Patent: April 24, 2007Assignee: Nippon Telegraph and Telephone CorporationInventors: Masami Urano, Hiromu Ishii, Toshishige Shimamura, Yasuyuki Tanabe, Katsuyuki Machida, Tomomi Sakata
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Patent number: 7189625Abstract: In a micromachine according to this invention, a polyimide film is formed on the surface of each electrode. The polyimide film is formed as follows. A substrate having each electrode and a counterelectrode are dipped in an electrodeposition polyimide solution, and a positive voltage is applied to the electrode. A material dissolved in the electrodeposition polyimide solution is deposited on a surface of the positive-voltage-applied electrode that is exposed in the solution, thus forming a polyimide film on the surface.Type: GrantFiled: October 4, 2005Date of Patent: March 13, 2007Assignee: Nippon Telegraph and Telephone CorporationInventors: Hiromu Ishii, Yasuyuki Tanabe, Katsuyuki Machida, Masami Urano, Shouji Yagi, Tomomi Sakata
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Patent number: 7123026Abstract: A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element.Type: GrantFiled: January 18, 2002Date of Patent: October 17, 2006Assignee: Nippon Telegraph and Telephone CorporationInventors: Norio Sato, Katsuyuki Machida, Hakaru Kyuragi, Satoshi Shigematsu, Hiroki Morimura, Hiromu Ishii, Toshishige Shimamura
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Publication number: 20060115920Abstract: In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.Type: ApplicationFiled: January 11, 2006Publication date: June 1, 2006Inventors: Masami Urano, Hiromu Ishii, Toshishige Shimamura, Yasuyuki Tanabe, Katsuyuki Machida, Tomomi Sakata
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Publication number: 20060027839Abstract: In a micromachine according to this invention, a polyimide film is formed on the surface of each electrode. The polyimide film is formed as follows. A substrate having each electrode and a counterelectrode are dipped in an electrodeposition polyimide solution, and a positive voltage is applied to the electrode. A material dissolved in the electrodeposition polyimide solution is deposited on a surface of the positive-voltage-applied electrode that is exposed in the solution, thus forming a polyimide film on the surface.Type: ApplicationFiled: October 4, 2005Publication date: February 9, 2006Inventors: Hiromu Ishii, Yasuyuki Tanabe, Katsuyuki Machida, Masami Urano, Shouji Yagi, Tomomi Sakata
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Publication number: 20050214960Abstract: A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.Type: ApplicationFiled: April 7, 2005Publication date: September 29, 2005Inventors: Norio Sato, Katsuyuki Machida, Hakaru Kyuragi, Satoshi Shigematsu, Hiroki Morimura, Hiromu Ishii, Toshishige Shimamura
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Patent number: 6912336Abstract: An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.Type: GrantFiled: March 11, 2003Date of Patent: June 28, 2005Assignee: Nippon Telegraph and Telephone CorporationInventors: Hiromu Ishii, Yasuyuki Tanabe, Katsuyuki Machida, Masami Urano, Toshishige Shimamura, Yuji Uenishi, Takanori Kiyokura
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Patent number: 6844744Abstract: A surface shape recognition sensor of this invention has a surface protective film having a hydrophobic property on an insulating protective film which is made of an insulator and formed to cover a sensor electrode, and includes at least a ground electrode which is formed on the substrate such that the ground electrode is partly exposed on the surfaces of the insulating protective film and surface protective film so as to be insulated/isolated from the sensor electrode and come into contact with the surface of a detection target. This sensor prevents fingerprint residues from easily remaining and improves tamper resistance.Type: GrantFiled: February 5, 2003Date of Patent: January 18, 2005Assignee: Nippon Telegraph and Telephone CorporationInventors: Hiromu Ishii, Shouji Yagi, Katsuyuki Machida, Hakaru Kyuragi