Patents by Inventor Hironobu IWATANI

Hironobu IWATANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180277454
    Abstract: A substrate treatment method according to the present invention is a substrate treatment method of treating at least one substrate in a treatment tank with treatment liquid. The substrate treatment method includes the following processes of: acquiring in advance treatment information of the substrate to be treated in the treatment tank; specifying a predicted concentration change pattern corresponding to the acquired treatment information of the substrate by referencing correspondence information describing a plurality of situations possible for the treatment information and a plurality of concentration change patterns of the treatment liquid prepared in advance to respectively correspond to the plurality of situations of the treatment information; and carrying out concentration control of the treatment liquid based on the predicted concentration change pattern while the substrate is treated in the treatment tank.
    Type: Application
    Filed: February 7, 2018
    Publication date: September 27, 2018
    Inventors: Koji KURASAKI, Kenji EDAMITSU, Masaharu SATO, Kei TAKECHI, Takeshi MATSUMURA, Hiroaki UCHIDA, Shigeru YAMAMOTO, Tomohiro TAKAHASHI, Hironobu IWATANI, Shinji SUGIOKA