Abstract: A surface texture measuring machine includes: a parameter setting unit configured to set one or more parameters related to a surface texture of a workpiece; a measurement unit configured to calculate a measurement value corresponding to each of the parameters on the basis of displacement measurement data obtainable by scanning a surface of the workpiece or a master workpiece; a judgment value calculation unit configured to calculate a judgment value corresponding to each of the parameters with an assumption that the measurement value of the master workpiece is defined as a reference value and a value having a predetermined ratio relative to the reference value is defined as a tolerance; and a judgment unit configured to compare the measurement value of the workpiece and the judgment value for each of the parameters.

Abstract: In a control method of a drive stage device, a stage is floated on an air bearing, then a height of the stage while floating on the air bearing is measured as a first height. A work piece is placed on the stage and a height of the stage while holding the work piece is measured as a second height. A difference between the first height and the second height is calculated as a drop amount, and a weight of the work piece is calculated based on the drop amount. An upper limit speed of one of rotational drive and horizontal movement of the stage is determined based on the calculated work piece weight. A speed of the one of the rotational drive and the horizontal movement of the stage is controlled so as to not exceed the upper limit speed.

Abstract: There is provided a surface texture measuring apparatus in which a measurement device is replaced easily and safely. A measurement device is replaceable by attaching and detaching the measurement device to and from a drive mechanism part. The measurement device includes a bracket, and the bracket includes a first connector for transmitting and receiving a signal to and from the measurement device and feeding to the measurement device. The drive mechanism part includes a support frame to which the bracket is detachably attached, and the support frame includes a second connector electrically connected to the first connector. The signal is transmitted and received between the first connector and the second connector, and the first connector is fed from the second connector while the first connector and the second connector are connected. Insertion and removal between the first connector and the second connector to attach and detach the measurement device to and from the drive mechanism part is hot swappable.

Abstract: There is provided a surface texture measuring apparatus in which a measurement device is replaced easily and safely. A measurement device is replaceable by attaching and detaching the measurement device to and from a drive mechanism part. The measurement device includes a bracket, and the bracket includes a first connector for transmitting and receiving a signal to and from the measurement device and feeding to the measurement device. The drive mechanism part includes a support frame to which the bracket is detachably attached, and the support frame includes a second connector electrically connected to the first connector. The signal is transmitted and received between the first connector and the second connector, and the first connector is fed from the second connector while the first connector and the second connector are connected. Insertion and removal between the first connector and the second connector to attach and detach the measurement device to and from the drive mechanism part is hot swappable.

Abstract: In a control method of a drive stage device, a stage is floated on an air bearing, then a height of the stage while floating on the air bearing is measured as a first height. A work piece is placed on the stage and a height of the stage while holding the work piece is measured as a second height. A difference between the first height and the second height is calculated as a drop amount, and a weight of the work piece is calculated based on the drop amount. An upper limit speed of one of rotational drive and horizontal movement of the stage is determined based on the calculated work piece weight. A speed of the one of the rotational drive and the horizontal movement of the stage is controlled so as to not exceed the upper limit speed.

Abstract: A surface texture measuring method includes: moving a stylus toward an origin point; and, when the stylus reaches the origin point, braking the stylus to be stopped after overrunning the origin point waiting for a measurement start command (approach section setting operation); bringing the stopped stylus into contact with a target portion of the workpiece (workpiece setting operation); moving the stopped stylus in a measurement direction reverse to the overrunning (approach operation); and, when the stylus passes the origin point in the approach operation, continuing the movement of the stylus while acquiring data detected by the detector (measurement operation).

Abstract: A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki=rDATAi/DATAi, a display resolution DIVi=DATAi/ADi, and a corrected display resolution cDIVi=DIVi×ki; and displaying the corrected display value cDIVi=DIVi×ki.

Abstract: A surface texture measuring method includes: moving a stylus toward an origin point; and, when the stylus reaches the origin point, braking the stylus to be stopped after overrunning the origin point waiting for a measurement start command (approach section setting operation); bringing the stopped stylus into contact with a target portion of the workpiece (workpiece setting operation); moving the stopped stylus in a measurement direction reverse to the overrunning (approach operation); and, when the stylus passes the origin point in the approach operation, continuing the movement of the stylus while acquiring data detected by the detector (measurement operation).

Abstract: A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki=rDATAi/DATAi, a display resolution DIVi=DATAi/ADi, and a corrected display resolution cDIVi=DIVi×ki; and displaying the corrected display value cDIVi=DIVi×ki.

Abstract: A surface texture measuring device includes a threshold value storage module configured to store a threshold input through an operation key, a stylus move distance detector configured to detect a move distance in the trace direction of the stylus, a cumulative move distance storage module configured to cumulatively store the move distance of the stylus detected by the stylus move distance detector; and. a notification module (controller) configured to make a comparison between the threshold value stored in the threshold value storage module and the cumulative move distance stored in the cumulative move distance storage module and notifying a user of replacement of the stylus when the cumulative move distance has exceeded the threshold value.

Abstract: A surface texture measuring device includes a threshold value storage module configured to store a threshold input through an operation key, a stylus move distance detector configured to detect a move distance in the trace direction of the stylus, a cumulative move distance storage module configured to cumulatively store the move distance of the stylus detected by the stylus move distance detector; and. a notification module (controller) configured to make a comparison between the threshold value stored in the threshold value storage module and the cumulative move distance stored in the cumulative move distance storage module and notifying a user of replacement of the stylus when the cumulative move distance has exceeded the threshold value.

Abstract: In advance to measuring texture of the workpiece by a surface texture measuring machine (1), a workpiece orientation adjustment stage (10) is manually moved by the surface texture measuring machine (1) in accordance with calculated orientation correction amount of the workpiece, thus adjusting orientation of the workpiece. Since it is only necessary for an operator to operate respective adjustment means until reaching a displayed correction amount, operation thereof can be facilitated and orientation thereof can be highly accurately adjusted without impairing operability.

Abstract: A surface texture measuring apparatus allowing effects of vibration disturbance to be removed and a highly accurate measurement to be achieved. The surface texture measuring apparatus is further provided with a small surface texture measuring apparatus, which detects the amount of vibration of a workpiece while maintaining a detecting device in contact with the surface of the workpiece without moving the device along the workpiece. The main surface texture measuring apparatus conducts measurement with a high accuracy based on the detected unevenness value of the surface of the workpiece and on the amount of vibration detected by the small surface texture measuring apparatus.