Abstract: A non-contact conveying device for lifting and/or supporting wafer-like articles without physical contact with the articles. The device has a pickup head with a cuhsion-vacuum room fully opened at its bottom and has an ejector opening located at the center of its upper wall and communicating with the cushion-vacuum room of the pickup head. The ejector opening is coupled to a positive pressure gas supply. The pickup head has an operating surface at the bottom of the side wall which is positioned adjacnet to an article to be lifted. In the case of a wide clearance existing between the operating surface and the article, the non-contact conveying device works as an ejector and the pressure within the cushion-vacuum room is decreased since the cushion-vacuum room acts in the manner of a vacuum room of an ejector and the space formed between the operating surface and the article acts in the manner of a diffuser of an ejector.