Abstract: The first aspect of the present invention is a paper sheet transport mechanism. This mechanism comprises a first paper sheet guide that forms a first paper sheet transport path, the first paper sheet guide having a rotating shaft; a pushing unit that pushes the first paper sheet guide in a specified direction around the rotating shaft; a projecting member that moves in conjunction with movement of the first paper sheet guide; a second paper sheet guide that forms a second paper sheet transport path such that paper sheets are transferred between the first and second paper sheet guides; and a alignment unit that moves in conjunction with a retune movement of the second paper sheet guide to be in contact with the projecting member against the pushing by the pushing unit and to align one end of the first paper sheet guide and one end of the second paper sheet guide.

Abstract: The first aspect of the present invention is a paper sheet transport mechanism. This mechanism comprises a first paper sheet guide that forms a first paper sheet transport path, the first paper sheet guide having a rotating shaft; a pushing unit that pushes the first paper sheet guide in a specified direction around the rotating shaft; a projecting member that moves in conjunction with movement of the first paper sheet guide; a second paper sheet guide that forms a second paper sheet transport path such that paper sheets are transferred between the first and second paper sheet guides; and a alignment unit that moves in conjunction with a retune movement of the second paper sheet guide to be in contact with the projecting member against the pushing by the pushing unit and to align one end of the first paper sheet guide and one end of the second paper sheet guide.

Abstract: A method of making a high quality optical waveguide substrate is provided, in which the surface of a silicon substrate is oxidized through relatively large thickness and no foreign matter particles are adhered on the surface thereof. The silicon substrate to form a quartz film for the optical waveguide is mounted on a carbon contained ceramics sample base and is inserted into a carbon contained ceramics furnace core tube of which its external circumference is arranged in a heating furnace. When the inside of the furnace core tube is heated to 200 to 600° C. by the heating furnace, an oxidant gas for the silicon substrate surface is introduced, then by further heating up to 1200 to 1350° C., the silicon surface is thus oxidized.

Abstract: An optical waveguide substrate, which has less particles or concave pits caused by Oxidation Induced Stacking Fault on the quartz film when oxidizing the surface of the silicon substrate relatively thickly and forming on its surface a quartz film to become an optical waveguide, is manufactured. The making method of the optical waveguide substrate comprises a step of exposing a silicon substrate to an atmosphere of oxidizing gas while heating to form a quartz film on the surface thereof for an optical waveguide, characterized in that a density of Oxygen contained in said silicon substrate is 24 ppma at maximum.

Abstract: A method of making a high quality optical waveguide substrate is provided, in which the surface of a silicon substrate is oxidized through relatively large thickness and no foreign matter particles are adhered on the surface thereof. The silicon substrate to form a quartz film for the optical waveguide is mounted on a carbon contained ceramics sample base and is inserted into a carbon contained ceramics furnace core tube of which its external circumference is arranged in a heating furnace. When the inside of the furnace core tube is heated to 200 to 600° C. by the heating furnace, an oxidant gas for the silicon substrate surface is introduced, then by further heating up to 1200 to 1350° C., the silicon surface is thus oxidized.

Abstract: A silicon surface oxidation device utilizes a steam generator in which heated water is barely in contact with the members of the device, steam with no contamination is efficiently generated, and the silicon surface can be oxidized through relatively large thickness by using a steam oxidation method which is simple and high in safety. The steam generator has a feed port for pure water which flows along a surface in a chamber, an oscillator for oscillating a microwave toward the surface, a steam exit port for sending out the steam of the pure water generated from the surface by the microwave, and a discharge port for the pure water flowing along the surface. A heating furnace is connected to the steam exit port, and silicon placed in the heating furnace is oxidized by the steam generated by the microwave.

Abstract: An apparatus for measuring gas flow rate is comprised of a pipe body whose inside space performs as a passage for flowing measured gas. A housing including a generally U-shaped bypass passage is integrally formed with the pipe body. A plate-type flow-rate detection element is disposed in a first passage of the bypass passage, and a passage restricting portion is disposed in a second passage of the bypass passage downstream of the first passage. The inlet portion of the bypass passage is disposed in the vicinity of an axial center of the pipe body, and the outlet port of the bypass passage is disposed in the vicinity of a pipe wall of the pipe body. Therefore, the influence of a pulsating flow to the flow-rate detection element is decreased, and the high-accuracy detecting of gas flow-rate is executed.

Abstract: In an apparatus for detecting airflow quantity applicable to a vehicular internal combustion engine, a slit is formed so that an insulating substrate is partitioned into a main substrate portion and a sub substrate portion. A first temperature sensitive resistor, a heat generated main resistor 31, and a second temperature sensitive resistor are formed on the main substrate portion in film forms in the order with respect to the forward air stream direction (A). A difference in the resistance values of the first and second temperature sensitive resistors 32 and 33 detects the air stream direction and detects the flow quantity according to a temperature variation (namely, the variation in resistance value) in the heat generated temperature sensitive main resistor due to the cooling caused by the intake air.

Abstract: The present invention is able to detect the intake air quantity which has been discriminated into flow direction by detecting the engine intake air quantity at two locations separated in the direction of flow of the intake air, comparing the detection values and detecting the flow direction of the intake air based on for example the advance or delay of the phase of the intake air pulsations. As a result, when the flow is reversed, the detection value is subtracted so that a normal flow direction averaged intake air flow quantity is detected, thereby enabling improvement in for example the setting accuracy for the fuel supply quantity of an engine.

Abstract: In a seat belt retractor having a reel to which a belt is anchored at one end and which is spring biased pawl is pivotally mounted on a retractor frame for movement into and out of engagement with a pair of ratchet-toothed flanges provided on the reel. Disposed coaxially with the reel are a cam wheel rotatable simultaneously therewith and an inertia wheel rotatable through a predetermined angle relative to the cam wheel. These wheels have on and along their peripheries protuberances which are disposed at a predetermined pitch. During rotation of the reel in a direction of belt extension at relatively low acceleration, the inertia wheel is rotated in synchronism with the cam wheel via a spring. This spring yields, upon a high acceleration being imparted to the reel in the direction of belt extension, to permit the inertia wheel to lag behind the cam wheel by the predetermined angle.